圖像對(duì)角線長(FOV) |
[mm] |
100 |
150 |
225 |
300 |
450 |
600 |
850 |
1200 |
X,Y-分辨率 |
[μm] |
30 |
50 |
70 |
100 |
150 |
200 |
270 |
400 |
分辨率上限 (Z) |
[μm] |
2 |
3 |
4 |
6 |
8 |
12 |
15 |
20 |
特征點(diǎn)精度 |
[μm] |
±8 |
±12 |
±15 |
±20 |
±30 |
±40 |
±55 |
±75 |