Diaphragm type pump creates vacuum by reciprocate movement of rubber diaphragms.
Pump structure makes Oil-free environment and maintenance easy.
Various pumping speed and two/single stages are selectable depends on your required pressure and pumping volume.
Applications
•
Vacuum chucks, wafer and tip handling devices.
•
Vacuum tweezers, medical appliances.
•
Printing equipment.
•
Automatic packing machines.
•
Optical appliances.
•
Semiconductor industry.
•
Injection molding machine.
Specifications
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Unit
50Hz
60Hz
Actual Pumping Speed
L/min
30
36
Ultimate pressure
Pa
6.7 × 103
Motor
Single phase, 100V, 200W, 4P, Split phase starting
Full load current
A
5.6
5.0
Weight
kg
11.0
Inlet, outlet pipe diameter
mm
O.D. dia.9 × I.D. dia.5 (Rc 1/4)
Ambient temperature
°C
7 – 40
Overall dimensions
mm
212(W) × 278(L) × 224.5(H)
Caution
1.
The pump is stopped when the lord is operated, and the pump can’t be operated just after that.
In this case, please return the atmospheric pressure the inside of the pump.
2.
Please don’t suck a causticity gas, an organic solvent, liquid and condensed gas (steam etc.).
Moreover, garbage, dust and etc. must not enter in the pump.
3.
A large current flows when the pump starts.
If ON/OFF of the pump power supply will be frequently done in a short time, trouble might be caused. Please do not turn a frequent power supply on and off in a short time.