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鍘熷瓙灞ゆ矇绌嶏紙Atomic layer deb锛夋槸涓€绋彲浠ュ皣鐗╄唱(zh矛)浠ュ柈鍘熷瓙鑶滃舰寮忎竴灞や竴灞ょ殑閸嶅湪鍩哄簳琛ㄩ潰鐨勬柟娉�銆傚師瀛愬堡娌夌⿳鑸囨櫘閫氱殑鍖栧娌夌⿳鏈夌浉浼间箣铏曘€備絾鍦ㄥ師瀛愬堡娌夌⿳閬庣▼涓�锛屾柊涓€灞ゅ師瀛愯啘鐨勫寲瀛稿弽鎳�(y墨ng)鏄洿鎺ヨ垏涔嬪墠涓€灞ょ浉闂�(gu膩n)鑱�(li谩n)鐨�锛岄€欑ó鏂瑰紡浣挎瘡娆″弽鎳�(y墨ng)鍙矇绌嶄竴灞ゅ師瀛�銆�

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1锛�?鏅堕珨绠℃煹妤典粙闆诲堡锛坔igh-k锛夊拰閲戝爆鏌甸浕妤碉紙bl gate锛�

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9锛�?宓屽叆寮忛浕瀹�

10锛�?闆荤瑷橀寗纾侀牠

11锛�?鍚勯钖勮啘 lt;100nm锛�

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鐩墠甯傞潰涓婂崰鍦皕ui灏忥紝鍙吋瀹瑰悇椤炴綌鍑堝瑕佹眰鐨勭郴绲�(t菕ng)锛�

鍙互鐐洪潪妯欐簴妯ｅ搧鑰岃▊鍒剁殑澶惧叿锛屽?SEM / TEM?鐭埅绶�

鍘熷瓙灞ゆ矇绌岮LD鐨勬噳(y墨ng)鐢ㄥ寘鎷細

1) High-K浠嬮浕鏉愭枡?(Al2O3, HfO2, ZrO2, PrAlO, Ta2O5, La2O3)锛�

2)灏�(d菐o)闆婚杸闆绘サ?(Ir, Pt, Ru, TiN)锛�

3)閲戝爆浜掕伅(li谩n)绲�(ji茅)妲�(g貌u)?(Cu, WN, TaN,Ru, Ir)锛�

4)鍌寲鏉愭枡?(Pt, Ir, Co, TiO2, V2O5)锛�

5)绱嶇背绲�(ji茅)妲�(g貌u)?(All ALD Material)锛�

6)鐢熺墿閱�(y墨)瀛告秱灞�?(TiN, ZrN, TiAlN, AlTiN)锛�

7) ALD閲戝爆?(Ru, Pd, Ir, Pt, Rh, Co, Cu, Fe, Ni)锛�

8)澹撻浕灞�?(ZnO, AlN, ZnS)锛�

9)閫忔槑闆诲灏�(d菐o)楂�?(ZnO:Al, ITO);

10)绱闃绘搵灞�?(ZnO, TiO2);

11) OLED閳嶅寲灞�?(Al2O3);

12)鍏夊瓙鏅堕珨?(ZnO, ZnS:Mn, TiO2, Ta3N5);

13)闃插弽灏勬烤鍏夌墖?(Al2O3, ZnS, SnO2, Ta2O5)锛�

14)闆昏嚧鐧�(f膩)鍏夊櫒浠�?(SrS:Cu, ZnS:Mn, ZnS:Tb, SrS:Ce);

15)宸ヨ棟灞ゅ铦曞埢鏌垫瑒銆侀洟瀛愭摯鏁ｆ煹娆勭瓑?(Al2O3, ZrO2);

16)鍏夊鎳�(y墨ng)鐢ㄥ澶櫧鑳介浕姹�銆佹縺鍏夊櫒銆佸厜瀛告秱灞�銆佺磵绫冲厜瀛愮瓑?(AlTiO, SnO2, ZnO);

17)鍌虫劅鍣�?(SnO2, Ta2O5);

18)纾ㄦ悕娼ゆ粦鍔�銆佽厫铦曢樆鎿嬪堡?(Al2O3, ZrO2, WS2)锛�

鐩墠鍙互娌夌⿳鐨勬潗鏂欏寘鎷細

1锛夋哀鍖栫墿: Al2O3, TiO2, Ta2O5, ZrO2, HfO2, SnO2, ZnO, La2O3, V2O5, SiO2

2锛夋爱鍖栫墿: AlN, TaNx, NbN, TiN, MoN, ZrN, HfN, GaN, ?

3锛夋盁鍖栫墿: CaF2, SrF2, ZnF2,

4锛夐噾灞�: Pt, Ru, Ir, Pd, Cu, Fe, Co, Ni, ?

5锛夌⒊鍖栫墿: TiC, NbC, TaC, ?

6锛夊京(f霉)鍚堢祼(ji茅)妲�(g貌u)鏉愭枡: AlTiNx, AlTiOx, AlHfOx, SiO2:Al, HfSiOx, ?

7锛夌～鍖栫墿: ZnS, SrS, CaS, PbS,

閭佸彲璜炬妧琛�(sh霉)鏈夐檺鍏徃

瀹㈡湇鐔辩窔锛�4008800298

Q Q锛�3488598979