鏇存彌璁婂鍣ㄦ檪锛岃珛娉ㄦ剰闆昏矾鍜岀铏熶笂鐨勫師鐞嗗湒浠栧€戝憡瑷村摢浜涘皫(d菐o)鑱�(li谩n)鍏锋湁鐩镐綅淇¤櫉锛岀浉浣嶅苟涓嶇附鏄噸瑕佺殑锛屽洜姝わ紝鎮ㄥ苟涓嶇附鏄湪閭忚集绀烘剰鍦栦笂鐪嬪埌榛�锛岀暥(d膩ng)瀹冨€戣鍖呮嫭鍦ㄥ収(n猫i)鏅傛偍鍙互鍋囪ō(sh猫)瀹冩槸涓€鍊嬮渶瑕佺浉浣嶈〃绀烘硶鐨勬噳(y墨ng)鐢ㄧ▼搴忕劧鍚庢纰烘洿鎻涖€�銆�
AdvancedEnergy鑴堟矕灏勯牷闆绘簮鍔熺巼杓稿嚭鏈夊亸宸董淇叏鏀荤暐AERFG-1251銆丷FG 3001銆丷FG-5500锛岄湇闇嗘牸PFG 300 RF銆乀ruplasma MF3030锛屽鎭㏑301-13銆丷601-13銆丷1001-13绛夊悇绋悇妯g殑鍨嬭櫉灏勯牷闆绘簮缍慨璜嬭獚(r猫n)婧�(zh菙n)鎴戝€戝父宸炲噷绉戣嚜鍕曞寲鍏徃锛屾垜鍊戞棗涓嬫湁30澶氫綅鐨勬妧琛�(sh霉)浜哄摗鍦ㄧ窔鎻愪緵鏁呴殰鍜ㄨ鍙婄董淇湇鍕�(w霉)銆�
闅ㄦ(j墨)鍦栫墖]
浣嗛€欏湪灏忓皠闋婚浕婧愪腑鏄笉鍙彇鐨勶紝鍥犳锛屾噳(y墨ng)灏勯牷闆绘簮锛屼娇鍏跺叿鏈塠鎭板埌濂借檿"鐨勭珐娌栨檪闁撳拰闆诲灏哄锛屽垵绱氶枊闂�(gu膩n)妯″紡灏勯牷闆绘簮寤f硾鐢ㄤ簬闆诲瓙鍜屾(j墨)闆绘噳(y墨ng)鐢�锛屾绱氶枊闂�(gu膩n)妯″紡灏勯牷闆绘簮鑸囧垵绱氶枊闂�(gu膩n)妯″紡灏勯牷闆绘簮闈炲父鐩镐技锛屼絾鏂尝鍦ㄦ绱氬伌(c猫)瀹屾垚銆傘€�
AdvancedEnergy鑴堟矕灏勯牷闆绘簮鍔熺巼杓稿嚭鏈夊亸宸董淇叏鏀荤暐
灏勯牷闆绘簮鐒¤几鍑哄姛鐜囧師鍥�
1銆侀浕婧愬収(n猫i)閮ㄦ晠闅滐細灏勯牷闆绘簮鐨勯浕婧愰浕璺�銆佽几鍑哄尮閰嶉浕璺�銆侀﹨(q奴)鍕曢浕璺垨鎺у埗闆昏矾鍑虹従(xi脿n)鏁呴殰锛屽闆绘簮璁婂鍣ㄦ悕澹�銆佹暣娴佸櫒澶辨晥銆佹櫠楂旂鎼嶅銆侀﹨(q奴)鍕曚俊铏熺暟甯�銆佸井铏曠悊鍣ㄦ悕澹炴垨鎺у埗淇¤櫉鐣板父绛�锛岄兘鍙兘灏�(d菐o)鑷撮浕婧愮劇娉曟甯歌几鍑恒€�
2銆佸閮ㄨ矤(f霉)杓夋晠闅滐細璨�(f霉)杓夐亷澶ф垨璨�(f霉)杓変笉鍖归厤绛変篃鍙兘灏�(d菐o)鑷撮浕婧愮劇杓稿嚭銆傛鏅�锛屽槜瑭︽笡灏忚矤(f霉)杓夛紝鐪嬫槸鍚﹁兘澶犳仮寰�(f霉)姝e父宸ヤ綔鐙€鎱�(t脿i)銆�
3銆佷緵闆诲晱椤岋細闆绘簮渚涙噳(y墨ng)涓嶆甯�锛屽闆绘簮绶氭湭閫f帴鐗㈠浐銆侀浕婧愭彃搴ф晠闅滄垨闆绘簮闁嬮棞(gu膩n)鏈墦闁�锛岄兘鍙兘褰遍熆灏勯牷闆绘簮鐨勮几鍑哄姛鐜�銆�
4銆佽几鍏ヤ俊铏熷晱椤岋細灏勯牷闆绘簮閫氬父闇€瑕佸閮ㄨ几鍏ヤ俊铏熶締椹�(q奴)鍕曞拰鎺у埗鍔熺巼杓稿嚭銆傚鏋滆几鍏ヤ俊铏熸簮宸ヤ綔涓嶆?锛涜洯鍑戭悵_閫f帴鍒板皠闋婚浕婧愮殑杓稿叆绔彛锛屼篃鍙兘灏�(d菐o)鑷寸劇杓稿嚭銆�
5銆佷繚璀�(h霉)闆昏矾瑙哥櫦(f膩)锛氬皠闋婚浕婧愰€氬父鍏锋湁鍏�(n猫i)缃殑淇濊(h霉)闆昏矾锛岀敤浜庝繚璀�(h霉)瑷�(sh猫)鍌欏厤鍙楅亷杓�銆侀亷鐔辩瓑鎼嶅銆傚鏋滃瓨鍦ㄧ暟甯告儏娉侊紝淇濊(h霉)闆昏矾鍙兘鏈冭Ц鐧�(f膩)骞跺皣鍔熺巼杓稿嚭闂�(gu膩n)闁�銆�
6銆佹帶鍒惰ō(sh猫)缃晱椤岋細灏勯牷闆绘簮鐨勬帶鍒堕潰鏉挎垨杌熶欢鐣岄潰瑷�(sh猫)缃笉姝g⒑锛屽鍔熺巼杓稿嚭瑷�(sh猫)缃�銆侀牷鐜囪ō(sh猫)缃瓑涓嶆豢瓒宠姹�锛屼篃鍙兘灏�(d菐o)鑷寸劇杓稿嚭銆�
閬�(y霉n)琛屽彲闈�锛岄亷杓夎兘鍔涘挤(qi谩ng)锛涢噰鐢ㄩ珮闋昏畩鎻涙妧琛�(sh霉)锛屽叿鏈夎几鍑虹┅(w臎n)澹撱€侀檺娴�銆佺煭璺繚璀�(h霉)鍜屽姛鐜囧櫒浠堕亷鐔变繚璀�(h霉)鍔熻兘銆備富瑕佺敤閫旓細钃勯浕姹犲厖闆�锛孭CB鏆村厜鐕堥浕婧�銆傚椹楀銆佸皠闋婚浕婧愩€佽嚜鍕曟脯瑭﹁ō(sh猫)鍌�銆傞浕闃诲櫒銆佺辜闆诲櫒銆侀浕姗�(j墨)绛夐浕瀛愬厓浠惰€佸寲锛屼緥琛岃│椹�銆傞浕瀛愭椹楄ō(sh猫)鍌欍€佺敓鐢�(ch菐n)娴佹按绶氳ō(sh猫)鍌�銆侀€氳▕瑷�(sh猫)鍌欐娓�銆傚叾瀹冧竴鍒囬渶瑕佷娇鐢ㄥ皠闋婚浕婧愮殑鍫村悎銆備娇鐢ㄥ牬鍚堬細闆绘(j墨)椤烇細闆诲嫊杌婇浕姗�(j墨)銆侀浕鍕曡粖鎺у埗鍣�銆佺洿娴侀Μ閬�(d谩)娓│?y谩n)鍖n嚜?銆傞浕鍏烽锛歀ED娓│鍙婅€佸寲銆佺瘈(ji茅)鑳界噲娉℃脯瑭﹀強鑰佸寲銆佺噲鍏锋脯瑭︺€侀帰绲叉埃鍖栫瓑銆傛苯杌婇锛氭苯杌婇浕瀛�銆佸ぇ鍔熺巼鐩存祦闆绘(j墨)銆佹苯杌婇浕姗�(j墨)鎺у埗鍣�銆佽粖鐢ㄧ噲鍏�銆侀粸鐓欏櫒銆佹苯杌婂奖闊虫脯瑭﹀強鑰佸寲绛夈€傞浕瀛愬櫒浠堕锛氶浕瀹瑰櫒銆侀浕闃�銆佺辜闆诲櫒銆佹櫠楂旂銆佸偝鎰熷櫒绛�銆�
AdvancedEnergy鑴堟矕灏勯牷闆绘簮鍔熺巼杓稿嚭鏈夊亸宸董淇叏鏀荤暐
灏勯牷闆绘簮鐒¤几鍑哄姛鐜囩董淇柟娉�
1銆佺⒑瑾�(r猫n)闆绘簮绶氭槸鍚﹂€f帴鐗㈠浐锛岄浕婧愭彃搴ф槸鍚︽甯稿伐浣滐紝闆绘簮闁嬮棞(gu膩n)鏄惁鎵撻枊銆備娇鐢ㄦ脯瑭﹀剙鍣ㄦ鏌ラ浕婧愮殑杓稿叆闆诲鍜岄浕娴�锛岀⒑淇濆畠鍊戝湪姝e父鑼冨湇鍏�(n猫i)銆�
2銆佺⒑瑾�(r猫n)澶栭儴杓稿叆淇¤櫉婧愭槸鍚︽甯稿伐浣�锛屽苟姝g⒑閫f帴鍒板皠闋婚浕婧愮殑杓稿叆绔彛銆備娇鐢ㄤ俊铏熺櫦(f膩)鐢熷櫒鎴栫ず娉㈠櫒娓│杓稿叆淇¤櫉鐨勫箙搴﹀拰闋荤巼锛岀⒑淇濆畠鍊戞豢瓒冲皠闋婚浕婧愮殑瑕佹眰銆�
3銆侀€愪竴妾㈡煡闆绘簮闆昏矾涓殑闂�(gu膩n)閸靛厓浠�锛屽闆绘簮璁婂鍣�銆佹暣娴佸櫒銆侀浕瀹瑰櫒銆侀浕闃诲櫒绛�锛岀⒑淇濆畠鍊戞矑鏈夋悕澹炴垨鑰佸寲銆備娇鐢ㄨ惉鐢ㄨ〃鎴栫ず娉㈠櫒娓│閫欎簺鍏冧欢鐨勯浕澹撱€侀浕娴佸拰娉㈠舰锛屽垽鏂峰畠鍊戞槸鍚︽甯稿伐浣�銆�
4銆佹鏌ラ﹨(q奴)鍕曢浕璺腑鐨勬櫠楂旂銆侀﹨(q奴)鍕曚俊铏熺瓑鏄惁姝e父銆傛鏌ユ帶鍒堕浕璺腑鐨勫井铏曠悊鍣�銆佹帶鍒朵俊铏熺瓑鏄惁宸ヤ綔姝e父銆傚鏈夋晠闅�锛屾洿鎻涙悕澹炲厓浠舵垨瑾�(di脿o)鏁撮﹨(q奴)鍕曚俊铏熴€佹帶鍒朵俊铏�锛岀⒑淇濆畠鍊戞甯稿伐浣溿€�
5銆佹脯瑭﹀皠闋昏几鍑哄尮閰嶉浕璺�锛屾鏌ラ浕闃诲櫒鍜岄浕瀹瑰櫒绛夊厓浠舵槸鍚︽甯稿伐浣�銆傚鏈夋晠闅�锛屾洿鎻涙悕澹炵殑鍏冧欢锛岄噸鏂伴€�(j矛n)琛岃几鍑哄尮閰嶃€�
6銆佺⒑瑾�(r猫n)灏勯牷闆绘簮鐨勪繚璀�(h霉)闆昏矾鏄惁瑙哥櫦(f膩)锛屽鏋滆Ц鐧�(f膩)锛屾壘鍑鸿Ц鐧�(f膩)鐨勫師鍥犲苟瑙f焙銆傛鏌ヤ繚璀�(h霉)闆昏矾涓殑鍏冧欢鏄惁宸ヤ綔姝e父锛屽鏈夊晱椤岋紝鍙婃檪鏇存彌銆�
7銆佹鏌ュ皠闋婚浕婧愮殑鎺у埗闈㈡澘鎴栬粺浠剁晫闈紝纰轰繚鍔熺巼杓稿嚭瑷�(sh猫)缃�銆侀牷鐜囪ō(sh猫)缃瓑鍙冩暩(sh霉)姝g⒑鐒¤銆�
8銆佹鏌ュ閮ㄨ矤(f霉)杓夋槸鍚﹂亷澶ф垨涓嶅尮閰�锛岄€欏彲鑳藉皫(d菐o)鑷撮浕婧愮劇杓稿嚭銆傚槜瑭︽笡灏忚矤(f霉)杓夋垨鏇存彌鍖归厤鐨勮矤(f霉)杓�锛岀湅鏄惁鑳藉鎭㈠京(f霉)姝e父宸ヤ綔銆�
瑷卞灏佽鍔熺巼鏅堕珨绠″叿鏈夊収(n猫i)缃尮閰嶇恫(w菐ng)绲�(lu貌)锛屼互澧炲姞鍣ㄤ欢鐨勫伐浣滃付瀵€傚収(n猫i)缃尮閰嶇恫(w菐ng)绲�(lu貌)鐨勮鐐洪浼间簬浠讳綍鍖归厤缍�(w菐ng)绲�(lu貌)鐨勮鐐�銆傚洜姝�锛屽収(n猫i)缃尮閰嶇恫(w菐ng)绲�(lu貌)鍙互姹哄畾绲傛斁澶у櫒鐨勫伐浣滄ā寮忥紝寰炶€岄檺鍒惰几鍑哄姛鐜�锛屽挨鍏舵槸闆嗛浕妤垫晥鐜囥€傚緸閫欏€嬫剰缇╀笂瑾�锛屽叿鏈夊収(n猫i)缃尮閰嶇恫(w菐ng)绲�(lu貌)鐨勫皝瑁濇櫠楂旂閫氬父鍔熻兘椤炰技浜庢斁澶у櫒鑰屼笉鏄櫠楂旂銆傛澶�锛屽櫒浠剁殑閸靛悎浠ュ強鍕曟厠(t脿i)鍜岄洔鏁i浕瀹逛篃鏈冮檺鍒惰ō(sh猫)瑷堢殑鎬ц兘銆傞€氶亷鍟嗙敤鍔熺巼鏅堕珨绠$殑鍏�(n猫i)缃尮閰嶇恫(w菐ng)绲�(lu貌)鍦ㄤ笉鍚岃娉笅鐪嬪埌鏁村€嬪彶瀵嗘柉鍦栬綁(zhu菐n)鎻涚殑鍗€(q奴)鍩熴€傚垎鏋愪簡鍖归厤缍�(w菐ng)绲�(lu貌)灏峈FPA鏁堢巼鍜岃几鍑虹殑褰遍熆銆傚尮閰嶇恫(w菐ng)绲�(lu貌)鐨勯珮闋昏鐐轰笉鍍呭奖闊縍F鏀惧ぇ鍣ㄧ殑鎬ц兘锛岄倓褰遍熆鍏跺伐浣滄ā寮�銆傛牴鎿�(j霉)鍖归厤缍�(w菐ng)绲�(lu貌)鐨勯珮闋昏鐐虹⒑瀹氾紝浜屾璜ф尝铏曠殑璨�(f霉)杓夊皪浜庢彁鐜囪嚦闂�(gu膩n)閲嶈銆備笁娆″拰鏇撮珮璜ф尝铏曠殑璨�(f霉)杓夊儏鏈夊姪浜庢敼鍠勬經鍦ㄧ殑鐜囪鐐�銆�
姘村钩杓稿嚭鏅堕珨绠202姝e父锛屼絾闆嗛浕妤礠202涓婄殑闆诲鍍呮脯閲忕偤98浼�锛岃€屼笉鏄墍闇€鐨�128浼�锛岀暥(d膩ng)灏佽鐨勯珮澹撲笁鑱�(li谩n)鍣ㄨ垏娆$礆鏂烽枊鏅俀202鐨勯泦闆绘サ闆诲涓婂崌鍒版墍闇€鐨�128浼�锛岄€欏€嬮潪甯搁噸瑕佺殑鏁呴殰鎺掗櫎鍟忛鏄畩澹撳櫒璨�(f霉)杓夌殑涓€鍊嬪緢濂界殑渚嬪瓙銆�銆� 濡備綍灏嶅皠闋婚浕婧愭ā濉婇€�(j矛n)琛屾晠闅滄帓闄わ紝绋嬪簭鏌ョ湅鍌虫劅鍣ㄧ媭鎱�(t脿i)锛屽湪CLI涓�锛岄亱(y霉n)琛岄’绀哄叾浠栧偝鎰熷櫒鍛戒护锛屾煡鐪嬪皠闋婚浕婧愬瀷铏熸寚绀虹噲锛岀稜鑹插父浜〃绀烘ā濉婂凡閫f帴鍒板皠闋婚浕婧�锛岀磪鑹插父浜噲琛ㄧず妯″鐒℃硶姝e父宸ヤ綔鍦ㄨō(sh猫)瑷堣(gu墨)鑼冭寖鍦嶅収(n猫i)锛屽鏋滄湭浜捣銆傘€� 瀹冮倓鍙互鐐虹収鏄�锛岄浕鍣ㄥ拰鍏朵粬闇€姹傛彁渚涘倷鐢ㄩ浕婧愶紝鍦ㄧ⒑瀹氱櫦(f膩)闆绘(j墨)鐨勬斁缃綅缃檪锛屽畨鍏ㄧ稉(j墨ng)閵峰晢鎶€琛�(sh霉)浜哄摗鎳�(y墨ng)纰轰繚閬靛畧鍒堕€犲晢鐨勮(gu墨)鏍煎拰鐣�(d膩ng)?sh霉)鑳ゃ剴?gu墨)闂�(gu膩n)浜庣櫦(f膩)闆绘(j墨)鍙互鏀剧疆鍦ㄩ洟瀹跺杩戠殑瑕佹眰锛岃几鍏�锛岄€欓€氬父鑸囩窔鎬ч浕婧愬拰SMPS涔嬮枔闈炲父鐩镐技銆�銆�
AdvancedEnergy鑴堟矕灏勯牷闆绘簮鍔熺巼杓稿嚭鏈夊亸宸董淇叏鏀荤暐
浣跨敤鍓嶉潰鏉块’绀哄櫒锛屽伐绋嬪斧鍙互瑷�(sh猫)缃浕澹撴垨闆绘祦姘村钩渚嗙偤DUT渚涢浕锛屽ぇ澶氭暩(sh霉)鑷哄紡闆绘簮鍙互鍦ㄥ叐绋ā寮忎笅閬�(y霉n)琛�:鎭掑鍜屾亽娴侊紝鑷哄紡闆绘簮鐨勪竴鍊嬮噸瑕佸姛鑳芥槸鑳藉鍦ㄦ亽娴�(CC)鍜屾亽澹�(CV)妯″紡涓嬪伐浣�锛屽湪CV妯″紡涓�锛岄浕婧愭牴鎿�(j霉)鐢ㄦ埗瑷�(sh猫)缃(di脿o)绡€(ji茅)杓稿嚭闆诲銆傘€� 2锛庣劧鍚庡皣瑭叉暩(sh霉)瀛楅櫎浠ヤ互鐡︾壒(W)鐐哄柈浣嶇殑璨�(f霉)杓�锛岄洊鐒堕亱(y霉n)琛屾檪闁撲技涔庡緢瀹规槗閲忓寲锛屼絾浜嗚В鏁�(sh霉)瀛楄儗鍚庣殑浜嬪鏈夊姪浜庣偤鎮ㄧ殑鐗瑰畾妤�(y猫)鍕�(w霉)鎴栨噳(y墨ng)鐢ㄧ⒑瀹氶浕姹犲倷浠借В姹烘柟妗�锛岃€冩叜浠ヤ笅瑙f焙鏂规鍫存櫙:1锛岄亱(y霉n)琛屾檪闁撶偤10-15鍒嗛悩涓旂劇灏勯牷闆绘簮鐨勫皠闋婚浕婧愨攢鈹€瑭茶В姹烘柟妗堝厑瑷辨湁鏅傞枔瀹夊叏鍦伴棞(gu膩n)闁夐€f帴鐨勮ō(sh猫)鍌欏苟淇濆瓨姝e湪閫�(j矛n)琛岀殑宸ヤ綔銆傘€�
AdvancedEnergy鑴堟矕灏勯牷闆绘簮鍔熺巼杓稿嚭鏈夊亸宸董淇叏鏀荤暐
妾㈡煡杓稿嚭绶氭檪锛屽畠鍊戝儏鍖呭惈+鍜�-绔瓙锛屽緢灏戝寘鍚繚璀�(h霉)鎬ф帴鍦�(鎺ュ湴)閫f帴锛岀劧鑰�锛屽皪浜庣┖瑾�(di脿o)绯荤当(t菕ng)锛岄€欑ó绮樺悎鎺ュ湴绯荤当(t菕ng)鍙楀埌闈炲父鍤�(y谩n)鏍肩殑鐩�(ji膩n)绠″拰瑕佹眰锛屽繀闋堝绲傚晱鐨勫€嬪熀鏈晱椤�:鏄惁闇€瑕侀€f帴锛屼互鍙婁粈涔堟浠朵締瑾�(di脿o)绡€(ji茅)閫欑ó閫f帴锛屼締鑷狽EC绗�250.162绡€(ji茅)銆�銆� 鑰岃ū澶氶浕瀛愯ō(sh猫)鍌欎娇鐢ㄥ皠闋婚浕婧�锛屼竴鏃︽偍鐭ラ亾闇€瑕佷綆绱嬫尝闆诲鐨勫皠闋婚浕婧愶紝灏卞繀闋堥伕鎿囧皠闋婚浕婧愰鍨�锛岀┅(w臎n)澹撳皠闋婚浕婧愭湁鍏╃ó閬告搰-绶氭€у拰闁嬮棞(gu膩n)椤炲瀷锛岄€欎簺褰㈠紡鐨勭┅(w臎n)澹撳皠闋婚浕婧愪箣闁撶殑宸暟鍙栨焙浜庨浕娴佷綍鏅傚緸浜ゆ祦璁�?y艒u)姗圭环槌庣徆C鍜孌C绌�(w臎n)澹撳皠闋婚浕婧愰兘鐐哄叾渚涢浕鐨勯浕瀛愯ō(sh猫)鍌欐彁渚涘共鍑�銆�銆� 鍟忛灏辨渻瓒婂揩寰楀埌绯炬锛屽绲傞€氶亷鍏堝煼(zh铆)琛岀啊鍠搷浣滀締闁嬪鏁呴殰鎺掗櫎:纰轰繚瑷�(sh猫)鍌欏凡鎻掑叆骞舵墦闁�锛屾鏌ヤ繚闅挡锛屾鏌ユ槸鍚﹀缓绔嬩簡鎵€鏈夐€f帴锛屽晱鍟忚嚜宸憋紝[鎴戝繕瑷樹簡浠€涔堝棊锛屽熀鏈晠闅滄帓闄ゆ脯瑭﹁ō(sh猫)鍌欙紝灏勯牷闆绘簮缍慨鏁呴殰鎺掗櫎鎶€琛�(sh霉):鏁�(sh霉)瀛楄惉鐢ㄨ〃(DMM)鑳藉浠ユ偍鎵撶畻宸ヤ綔鐨勯牷鐜囪畝鍙�銆�銆�
ajqa2htr7doa
鐟炴€濇澃鐖綬F灏勯牷闆绘簮鍔熺巼杓稿嚭鏈夊亸宸董淇叏鏀荤暐锛�http://www.jdzj.com/jiage/5_33854038.html