伺服電機過載，后轉(zhuǎn)速會變慢甚至停轉(zhuǎn)。為了避免這種情況發(fā)生，必須對電機的過載能力進行校驗； 3、當負載突然加大或減小時，電機轉(zhuǎn)速會突然降低。為了避免這種情況發(fā)生，應(yīng)該對負載的大小進行調(diào)整。 伺服電機與機械系統(tǒng)連接不良 1、伺服電機的編碼器故障 2、機械傳動鏈的齒條等磨損，造成卡死 3、機械傳動鏈的減速機構(gòu)損壞 4、齒輪損傷或磨損過度 5、電機軸與減速機構(gòu)不同心或固定不牢 6、電機軸與減速機連接過緊或過松 7、變頻器損壞 8、伺服驅(qū)動器損壞或其端口故障，造成通訊中斷；或者伺服驅(qū)動器故障，不能向伺服電機提供電流。此時應(yīng)檢查電源是否正常，交流伺服電機與電動機連接線有無松動和斷線；檢查接線端子的性是否正確APPLIED MATERIALS 3060-01225 BEARING BALL
APPLIED MATERIALS 3060-01230 BRG BALL 875ODX.375IDX.219W UNSHLD ABE
APPLIED MATERIALS 3060-01261 BRG BALL RAD CONT 4.250ID 4.7
APPLIED MATERIALS 3060-01473 BEARINGS
APPLIED MATERIALS 3060-01500 BEARING
APPLIED MATERIALS 3060-01502 BEARING, BALL BSHG
APPLIED MATERIALS 3060-01563 BEARING
APPLIED MATERIALS 3060-01609 BEARING, SNAPOVER
APPLIED MATERIALS 3060-01616 BEARING MIRRA CMP
APPLIED MATERIALS 3060-01649 BEARING 1.500 X 1.875 X .1875
APPLIED MATERIALS 3060-01659 DUPLEX BEARING .250 X .625 X .196
APPLIED MATERIALS 3060-01683 BRG BLL FLG 1/4 ID 1/2 OD 1/8 W STST
APPLIED MATERIALS 3060-01696 BRGBALL 1.3125ODX1.000IDX.157
APPLIED MATERIALS 3060-01728 BRG SLEEVE FLG
APPLIED MATERIALS 3060-01783 BEARING,B DRIVE PULLEY,MESA CLEANER,12MMX28MM
APPLIED MATERIALS 3060-01783 BEARING,B DRIVE PULLEY,MESA CLEANER,12MMX28MM
APPLIED MATERIALS 3060-01784 BRG,BALL,10MM,BORE,X,30MM,OD,DUPLEX,G-33
APPLIED MATERIALS 3060-01804 BRG,SLEEVE,ROLLER,ASSY
APPLIED MATERIALS 3060-01806 RLR, PINCH DRIVE ASSYMETRIC (
APPLIED MATERIALS 3060-01806 RLR, PINCH DRIVE ASSYMETRIC (
APPLIED MATERIALS 3060-90060 BEARINGS
APPLIED MATERIALS 3060-90076 BRG NEEDLE ROLLER
APPLIED MATERIALS 3060-90077 BEARING
APPLIED MATERIALS 3060-90077 BEARING
APPLIED MATERIALS 3060-90091 BALL BEARING
APPLIED MATERIALS 3060-90178 BRG INNER RING
APPLIED MATERIALS 3060-90185 BEARING DRY
APPLIED MATERIALS 3060-90206 BRG LINEAR
APPLIED MATERIALS 3060-90207 BRG INNER RING
APPLIED MATERIALS 3060-90208 BRG NEEDLE
APPLIED MATERIALS 3060-90222 BEARING
APPLIED MATERIALS 3060-90282 E.S.E. SLIDE BEARING
APPLIED MATERIALS 3060-90283 BEARING
APPLIED MATERIALS 3060-90286 BEARING, 140 X 175 X 18 DP. GROOVE
APPLIED MATERIALS 3060-90287 BEARING BALL 40x17x12 (2 SEALS SKF)
APPLIED MATERIALS 3060-90288 BEARING BALL 50X80X16 (2 SEALS)
APPLIED MATERIALS 3060-90290 BALL BEARING
APPLIED MATERIALS 3070-01005 BLWS,BONNET,STP,6.0
APPLIED MATERIALS 3070-01017 BELLOW, 1" TUBE OPX
APPLIED MATERIALS 3070-02817 GAS LINE
APPLIED MATERIALS 3070007 CLEAN TAPE
APPLIED MATERIALS 30706675000 FFU REAR PANEL
APPLIED MATERIALS 30706746000 FFU LEFT COVER
APPLIED MATERIALS 30706747000 FFU FRONT TOP COVER
APPLIED MATERIALS 30706755000 FFU RIGHT COVER
APPLIED MATERIALS 30712370100 FDPM ASSY
APPLIED MATERIALS 3080-01002 BELT, TIMING, .0816 X 1/4 WIDE (PACK OF 10)
APPLIED MATERIALS 3080-01006 TIMING BELT, .0816P X 1/8 (PACK OF 10)
APPLIED MATERIALS 3080-01006* BELT TMG .0816P 1/8W 77T POLYURETHANE
APPLIED MATERIALS 3080-01015 BELT, TIMING
APPLIED MATERIALS 3080-01015 BELT, TIMING
APPLIED MATERIALS 3080-01020 BELT, POSITIVE DRIVE 3/8"
APPLIED MATERIALS 3080-01020 BELT, POSITIVE DRIVE 3/8"
APPLIED MATERIALS 3080-01021 BELT, TIMING, 3/8P, 25T
APPLIED MATERIALS 3080-01027 BELT, TIMING 1/5 P
APPLIED MATERIALS 3080-01027 BELT, TIMING 1/5 P
APPLIED MATERIALS 3080-01035 TIMING BELT .082 PITCH X 1/8" 90
APPLIED MATERIALS 3080-01035 TIMING BELT .082 PITCH X 1/8" 90
APPLIED MATERIALS 3080-01038 BELT
APPLIED MATERIALS 3080-01104 BELT TMG 9L 1/5P 3/8 W URETHANE
APPLIED MATERIALS 3080-01123 BELT, TMG 3/8P 1/2W 60T RUBBER
APPLIED MATERIALS 3080-01141 BELT TMG 1/5P 3/8W 135TEETH URETHANE
APPLIED MATERIALS 3080-01142 BELT TMG 1/5P 3/8W 140TEETH URETHANE
APPLIED MATERIALS 3080-01143 BELT TMG 1/5P 3/8W 80TEETH URETHANE
APPLIED MATERIALS 3080-01143 BELT TMG 1/5P 3/8W 80TEETH URETHANE
APPLIED MATERIALS 3080-01144 BELT TMG 1/5P 3/8W 65TEETH URETHANE
APPLIED MATERIALS 3080-01150 BELT TMG 1/5P X 1/4W X 85GRV X 17 NEOPRENE
APPLIED MATERIALS 3080-01151 BELT TMG 1/5P X 1/4W 1700MM POLYURETHANE
APPLIED MATERIALS 3080-01152 BELT TMG 1/5P X 1/4W X 95GRV X 19 NEOPRENE
APPLIED MATERIALS 3080-01153 BELT TMG 13L 1/5P 3/8W URETHANE STEE
APPLIED MATERIALS 3080-01154 BELT TMG 1/5P X 1/4W X 15L POLYESTER
APPLIED MATERIALS 3080-01155 BELT TMG 14L 1/5P 3/8W URETHANE KEVL
APPLIED MATERIALS 3080-01168 TIMING BELT
APPLIED MATERIALS 3080-01170 BELT TMG 1/5P 3/8W 145GR 29L. URETHANE
APPLIED MATERIALS 3080-01172 BELT TMG 1/5P 3/8W 161GR 32.2L NYL/NEO
APPLIED MATERIALS 3080-50001 BELT TMG B 70MXL 6.4 T30N17
APPLIED MATERIALS 3080-51001 O RING BELT
APPLIED MATERIALS 3080-51002 O-RING
APPLIED MATERIALS 3080-90002 BELT DRIVE
APPLIED MATERIALS 3080-90032 BELT
APPLIED MATERIALS 308332-0270 VGM2 Synergy VME PCB
APPLIED MATERIALS 3090-01131* SCR CAP SKT HD 1/2-20X2-1/2L HEX SKT S
APPLIED MATERIALS 3090-01161 BOLT MTK M12
APPLIED MATERIALS 3140-01016 BRG BALL BHSG 1.25OID X 2X2.62
APPLIED MATERIALS 3140-01064 WHT. BRG BALL BSHG .750 ID X 1.25 OD X 1.62LG.
APPLIED MATERIALS 3140-01088 BUSHING TAPERED
APPLIED MATERIALS 3140-01127 BUSHING,ROLLER,ASSY
APPLIED MATERIALS 3150-01003 CAM FOLLOWER 5/8W 1/4-28 STUD
APPLIED MATERIALS 3150-01004 CAM FOLLOWER 5/8" X .440" M
APPLIED MATERIALS 3160-00003 COVER PLSTC FOR #1/4SCR WHITE
APPLIED MATERIALS 3160-01018 ENTEGRIS FLC6 PLASTIC FITTING FLC6
APPLIED MATERIALS 3160072 PCB, BINARY I/O (KOKUSAI)
APPLIED MATERIALS 3160084 PCB, FRONT PANEL (KOKUSAI)
APPLIED MATERIALS 3161031 PCB, BINARY I/O (KOKUSAI)
APPLIED MATERIALS 3161525v25 PCB, ANALOG I/O MICRO (KOKUSAI)
APPLIED MATERIALS 3161722V01 PCB, PCA SOLENOID DRIVER (KOKUSAI)
APPLIED MATERIALS 3180-01010 LATCH FLUSH LIFT + TURN 1 GRIP
APPLIED MATERIALS 3180-01016 LATCH O/C CLAMP SST 60 LB TOGGLE
APPLIED MATERIALS 3180-01049 CLASP DOOR, CABINET
APPLIED MATERIALS 32-30106-00 CYLINDER,AIR 9/16BX7.5S
APPLIED MATERIALS 32-30107-00 CYLINDER 6.5" BIMBA
APPLIED MATERIALS 32-30108-00 AIR CYLINDER, 1.13BX.75S
APPLIED MATERIALS 3200-00006 PANEL, LOWER, FIXLOAD, 300MM
APPLIED MATERIALS 3200-01030 COVER SAFTEY WATTMETER
APPLIED MATERIALS 3200-01202 PLATE GP CABINET LDM BLANK OF
APPLIED MATERIALS 3200-90110 CAB ACC. PANEL FRONT 4HP 6U
APPLIED MATERIALS 3220-00005 11 MM CPLG SHAFT
APPLIED MATERIALS 3220-00024 CPLG SHAFT FLAT 25MM & 1.97 BORE FLEX
APPLIED MATERIALS 3220-00030 COLLAR CLAMP, TYPE 12MM BORE SST
APPLIED MATERIALS 3220-00033 FLEX CLAMP(COUPLING)
APPLIED MATERIALS 3220-01006 CLAMP, THROTTLE VALVE SHAFT
APPLIED MATERIALS 3220-01029 BELLOWS, KF40 3"
APPLIED MATERIALS 3220-01032 COUPLING SHAFT HEXOD
APPLIED MATERIALS 3220-01036 COUPLING, SHAFT 1/4 BORE
APPLIED MATERIALS 3220-01037 COUPLING ADAPTOR SHAFT 1/8ID 1
APPLIED MATERIALS 3220-01054 CPLG SLEEVE
APPLIED MATERIALS 3220-01077 LIFT,PIN,BELLOWS,COUPLERS
APPLIED MATERIALS 3220-01077 LIFT,PIN,BELLOWS,COUPLERS
APPLIED MATERIALS 3220-01089 CPLGQDISC 1/2" BODY FEM 2.85LG X 1.75DIA 316SST
APPLIED MATERIALS 3220-01134 FLEX COUPLING, CPLR SHAFT 1/4 CLAMP TYPE SST
APPLIED MATERIALS 3220-90004 COUPLING PANAMECH 1/4" BORE
APPLIED MATERIALS 3250-00097 VESSEL ASSY 5L W/MANIFOLD & RELIEF VALVE
APPLIED MATERIALS 3250-01010 WAFER CARRIER, 5" WAFER
APPLIED MATERIALS 3250-01015 CNTNR WFR CARR FOR CASSETTE 1
APPLIED MATERIALS 3250-01020 WAFER CARRIER 200MM
APPLIED MATERIALS 3250-01069 CNTR WFR CARR FOR CASS 200MM
APPLIED MATERIALS 3250-01135 DRAIN CONTAINMENT DOUBLE LINE
APPLIED MATERIALS 33-10049-00 SWIT
