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產(chǎn)品簡介
ABB存儲(chǔ)卡ZMU-02
ABB存儲(chǔ)卡ZMU-02
產(chǎn)品價(jià)格:¥52
上架日期:2023-11-21 10:49:42
產(chǎn)地:進(jìn)口
發(fā)貨地:廈門
供應(yīng)數(shù)量:不限
最少起訂:1個(gè)
瀏覽量:49
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詳細(xì)說明
    西門子觸摸屏主要分為以下幾類: 1、西門子HMI按鍵面板: 這類西門子觸摸屏便于安裝和預(yù)組裝,可以進(jìn)行簡單而直接的操作,并且接線簡單,比常規(guī)觸摸屏接線節(jié)省大部分時(shí)間。防護(hù)等級(jí)IP65。 其突出特點(diǎn)如下: (1)可任意配置的大號(hào)按鍵,具有觸摸反饋,即使戴著手套也能可靠操作; (2)LED背光照明具有五種可選顏色,用于顯示各種機(jī)器狀態(tài); (3)集成以太網(wǎng)交換機(jī),支持線性環(huán)形拓?fù)渚W(wǎng)絡(luò); (4)非常適合安裝在全防護(hù)人機(jī)界面設(shè)備的擴(kuò)展單元中; (5)故障型可連接一個(gè)或兩個(gè)急停按鈕或其他故障信號(hào)。TEL ES1810-428050-11 FITTING INLET GAS B
    TEL ES1810-428121-11 CREW BLANK
    TEL ES1810-428129-11 SHIELD WINDOW
    TEL ES1810-428233-12 BAFFLE MTG SCREW M3 X 12 AH-V50
    TEL ES1810-428245-12 BAFFLE MTG SCREW M3X5 AH-V50
    TEL ES1810-428336-11 TERMINAL, HIGH VOLTAGE
    TEL ES1810-428520-12 PIN BOTTOM ELECTRODE SIDE WALL (0.5DIA)
    TEL ES1810-428715-12 CAP ALUMINIUM 2
    TEL ES1810-428806-11 UV CUT FILM (VIEW PORT)
    TEL ES1810-428943-11 SUPPORT LIFTER 4 (IPB)
    TEL ES1810-429126-11 GAS LINE P/C-2-UP (IPU)
    TEL ES1810-429138-11 H CONNECTION TUNE (UP)(IPB)
    TEL ES1810-429291-11 PIPE GAS HE
    TEL ES1810-429649-11 PUSHER LIFTER (PTFE) 3
    TEL ES1810-429707-12 UPPER ARM WIRE 180316 NYLON
    TEL ES1810-429708-11 WIRE FOR ROBOT ARM
    TEL ES1810-429709-11 WIRE FOR ROBOT ARM
    TEL ES1810-430038-11 PLATE HOT BUSSBAR(RF)
    TEL ES1810-430333-12 PIN FOR NEW UPPER COOLING BODY
    TEL ES1810-431227-11 CAP C/P(MNT) For 85 SCCM UEL.
    TEL ES1810-431239-11 PIN,LOCATING F/R TYPE C..S85DI.
    TEL ES1880-020093-16 POWER SPLITTER
    TEL ES1880-020094-15 MATCHER, MFM-20SA2
    TEL ES1880-020100-12 BALL SCREW GZ1504ES-ZAPR-0211*0166
    TEL ES1880-020101-12 BALL SCREW GZ1504ES-ZAPR-0191*0116
    TEL ES1880-027197-11 AIR CYLINDER CDJ2B16DA-E5161
    TEL ES1880-027247-12 BALL SCREW W1502-215X-C5T6
    TEL ES1880-027248-12 BALL SCREW W1502-216X-C5T6
    TEL ES1880-027504-11 AIR CLYINDER UC2-40-40-B2
    TEL ES1881-022002-19 PCB SYSTEM I/O 2 (ATM/MAIN SUB 06&07)
    TEL ES1881-022004-1C PCB EPD MONITOR BOARD (MAINTE CTLER)
    TEL ES1881-022005-52 PCB EXT UNIT INTCON BOARD (DTM)
    TEL ES1881-022006-13 PCB VAC INTCON BOARD
    TEL ES1881-022018-17 PCB U/C IF BOARD(MAINTE CTLER)
    TEL ES1881-022019-14 PCB REPEATER BOARD
    TEL ES1881-022047-56 PCB VAC CONTROL BOARD 2 IEM I/L (L/L1)
    TEL ES1881-022047-57 PCB VAC CONTROL BOARD 2 IEM I/L (L/L1)
    TEL ES1881-022047-72 PCB VACUUM CONTROL BOARD 2
    TEL ES1881-022048-11 PCB CHAM INTCON BOARD 2 (E/S)
    TEL ES1881-022060-26 PCB EPD MONITOR BOARD 2(ESC)
    TEL ES1881-022071-21 PCB AC DIST BOARD (HAS)
    TEL ES1881-022075-11 PCB AGV MODE SW INTCON BOARD(ATM)
    TEL ES1881-022118-28 PCB TSBC-V30B(SUB1)K8 (ATM/MAIN SUB 01)
    TEL ES1881-022126-12 PCB CHAM INTCON BOARD 3 (P/C)
    TEL ES1881-022132-21 PCB ANALOG MONITOR BOARD UTN(TMP)
    TEL ES1881-022135-41 PCB OPERATOR IF BOARD 2 IEM (ATM/OPER IF)
    TEL ES1881-022136-11 PCB OPE-PANE RELAY BOARD 3(MAINTE CTLER)
    TEL ES1881-022137-11 PCB OPE-PANE RELAY BOARD 3(I/L)
    TEL ES1881-022141-12 PCB RF CONTROL BOARD 4 (RF RACK)
    TEL ES1881-022142-11 PCB GAS IF BOARD(HE2)
    TEL ES1885-021882-12 P/C SHIELD RING
    TEL ES1886-455163-13 INDEXER ENCODER
    TEL ES1886-455164-12 INDEXER WATER SENSOR(LASER)
    TEL ES1886-455164-13 INDEXER WATER SENSOR (LASER)
    TEL ES1886-455165-12 INDEXER WATER SENSOR(PHOTO DIODE)
    TEL ES1886-455165-13 INDEXER WATER SENSOR (PHOTO DIODE)
    TEL ES1886-455221-12 P/C WALL PT SENSOR
    TEL ES1886-455291-11 CHUCK MOTOR ASSEMBLY
    TEL ES1886-455292-11 MOTER (P/A TWEEZERS)
    TEL ES1886-455294-1 MOTOR (P/A)
    TEL ES1886-455441-11 RF CABLE
    TEL ES1886-456363-12 ROTARY MOTOR AND ENCODER
    TEL ES1886-456364-12 EXTENDER MOTOR AND ENCODER
    TEL ES1886-457617-17 RF CABLE 10M (ES1D86-008352-12)
    TEL ES1886-458247-11 HAM LIFTER CYLINDER (ESC) ASSY
    TEL ES1886-461134-13 RF GENERATOR-MFG-20A1
    TEL ES1887-421988-11 GATE VALVE ASSEMBLY (IEM POLY)
    TEL ES1A80-1016700-11 SERVICE BOX, Z-610PC-BNNN
    TEL ES1D0-311007-12 TENSIONER GAP A1
    TEL ES1D02-400026-11 SPROCKET DRIVE
    TEL ES1D02-400026-11 SPROCKET DRIVE
    TEL ES1D02-400215-11 SHIELD SPIRAL U-CHAM (S-DT)
    TEL ES1D02-400262-11 SCREW BEARING
    TEL ES1D05-200020-11 SHIELD DEPO
    TEL ES1D05-200020C11 SHIELD, DEPO QU-A-3 (DRM2)
    TEL ES1D05-200031-11 COVER..BAFFLE Q-L3(DRM2)
    TEL ES1D05-300038-14 SHIELD DEPO DRM2
    TEL ES1D05-300053-14 RING INSULATER B2 (DRM2)
    TEL ES1D05-300083C13 PLATE UPPER QB FLAT
    TEL ES1D05-300152-11 COVER..BAFFLE,Q-L,(DRM2)
    TEL ES1D05-300152C11 COVER,BAFFLE,CESC
    TEL ES1D05-300161-11 SHIELD, SUPPORT DEPO Q-S1
    TEL ES1D05-300161C11 SHIELD,SUPPORT,DEPO,CESC
    TEL ES1D05-300162C11 RING, FOCUS
    TEL ES1D05-400022-14 WINDOW SHIELD DEPO DRM2
    TEL ES1D05-400022C14 WINDOW SHIELD DEPO(DRM2)
    TEL ES1D05-400028-11 WINDOW, UP A-2 (DRM)
    TEL ES1D10-090515-TM COVER BELLOW A CE-Y FOR CE RAMIC
    TEL ES1D10-100386-11 INSULATOR, BOTTOM P
    TEL ES1D10-100670-13 ELECTRODE UPPER QB FLAT
    TEL ES1D10-100907-12 BAFFLE PLATE
    TEL ES1D10-100915-11 ELECTRODE UPPER QB. FLAT
    TEL ES1D10-100938-12 RF PLATE,PC1 (DRM2)
    TEL ES1D10-101111-11 RF PLATE,PC2 (DRM2)
    TEL ES1D10-101446-22 PLATE,BAFFLE 0-12(DRM2)
    TEL ES1D10-1014746-22 PLATE BAFFLE 0-12 (D RM2 )
    TEL ES1D10-190272-TM COOLANT PIPE
    TEL ES1D10-190477-TM BASE,DEPO SHIELD SUPPORT, E
    TEL ES1D10-200705-14 UPPER, ELECTRODE, 1, (DRM2)
    TEL ES1D10-200733-11 RING, SHIELD (DRM2)
    TEL ES1D10-200921-12 DEPO SHIELD
    TEL ES1D10-201429-15 UPPER,ELECTRODE R-1
    TEL ES1D10-201588-12 UPPER ELECTRODE P (DRM2)
    TEL ES1D10-201595-15 SHIELD, DEPOT 85L DRM2
    TEL ES1D10-202177-12 UPPER ELECTRODE
    TEL ES1D10-203753-12 RING, CENTERING-Y
    TEL ES1D10-204310C11 200MM UPPER ELECTRODE MODIFIED
    TEL ES1D10-301452-12 HOLDER,BEARING,(DRM2)
    TEL ES1D10-302057-11 JIG, GAP (DRM2)
    TEL ES1D10-302569-13 BRACKET..SLIDE,R,(DRM2)
    TEL ES1D10-302586-12 COVER BELLOWS B
    TEL ES1D10-302600-11 SUPPORT S-PIPE
    TEL ES1D10-302869-11 PUSHER PIN
    TEL ES1D10-302936-11 SHAFT RF INLET
    TEL ES1D10-303014-12 SUPPORT SHIELD DEPO DRM2
    TEL ES1D10-303124-16 DEPO SHIELD
    TEL ES1D10-303124-M1 SHIELD, DEP
    TEL ES1D10-303356-11 CASSETTE CHAMBER VACUUM PIPE
    TEL ES1D10-303367-14 PIPE, TEE
    TEL ES1D10-304039-11 FLEXLINE, HE/VAC
    TEL ES1D10-305152-11 COVER , SCREW  TEFLON
    TEL ES1D10-305523-12 PIPE HE-IEM-UP
    TEL ES1D10-305996-11 IPE..HE1-8
    TEL ES1D10-306221-13 JIG RING, 2 (DRM2)
    TEL ES1D10-306628-11 WINDOW DEPO DRM2
    TEL ES1D10-308722-11 RING, FOCUS, SEASONED
    TEL ES1D10-311007-12 TENSIONER GAP A1
    TEL ES1D10-311008-11 TENSIONER GAP B1
    TEL ES1D10-311117-12 PIPE PN2-CC-3
    TEL ES1D10-311258-11 COVER,BEL-L(C-ESC)
    TEL ES1D10-311259-11 COVER,BEL-S,(C-ESC)
    TEL ES1D10-311259-11 COVER,BEL-S,(C-ESC)
    TEL ES1D10-311745-13 RING, BELLOWS UPPER
    TEL ES1D10-311758-11 RING, BELLOWS LOWER
    TEL ES1D10-312197 RING, FOCUS, (C-ESC 4.0MM SIC)
    TEL ES1D10-312197-11 RING, FOCUS, (C-ESC 4.0MM SIC)
    TEL ES1D10-312204-11 RING, FOCUS, (C-ESC 3.4MM SIC)
    TEL ES1D10-313045-11 RING..F-8S-GC-260-3.2
    TEL ES1D10-314780-12 RING BELLOW ME CHAMBER
    TEL ES1D10-390020-TM GASKET
    TEL ES1D10-390510-TM WINDOW,UPPER WALL EPD
    TEL ES1D10-390540-TM PLUG DEPO SHIELD FOR CERAM IC
    TEL ES1D10-390908-TM LIFTER T-HANDLE
    TEL ES1D10-401239-11 SHAFT DRIV FOR CHAIN
    TEL ES1D10-401722-11 COVER,ESC
    TEL ES1D10-402032-11 BUSH P-PIN
    TEL ES1D10-402033-11 SUPPORT BUSH
    TEL ES1D10-402043-11 SUPPORT S-PIPE
    TEL ES1D10-402047-11 BUSH..PIPE,COOLING,(DRM2)
    TEL ES1D10-404150-11 SLEEVE, A DRM2 E
    TEL ES1D10-404281-12 PIPE UEL A (DRM2)
    TEL ES1D10-404854-11 GUIDE, CE-ESC, DRM2C (PACK OF 10)
    TEL ES1D10-405369-11 BASE IDLE A
    TEL ES1D10-405373-12 COLLAR C-1(DRM2)
    TEL ES1D10-406875-11 PIN SUPPORT Q-S1(DRM2)
    TEL ES1D10-406876-11 PIN SUPPORT Q-S2(DRM2)
    TEL ES1D10-407211-11 SHEET SUPPORT-125(DRM2)
    TEL ES1D10-407410-11 COLLAR D-2
    TEL ES1D1805-320140-11 COVER, RING INNER TEL SCCM -
    TEL ES1D80-000626-1X APC BOARD
    TEL ES1D80-000700-11 EPD,FIBER
    TEL ES1D80-000999-11 PUSH MOTOR DRIVER
    TEL ES1D80-001025-11 NESLAB COOLING TYPE CHILLER
    TEL ES1D80-001878-12 LEN EPD TYPE2
    TEL ES1D80-002077-12 XFR SYS..BC930197 SRC2/014
    TEL ES1D80-002201-12 XFR SYS RELAY BOX
    TEL ES1D80-002331-12 GATE VALVE
    TEL ES1D80-002332-12 VALVE GATE
    TEL ES1D80-002336-12 VALVE GATE
    TEL ES1D80-002751-11 ANGLE VALVE, XLA-40-X519
    TEL ES1D80-002787-12 BA GAUGE LEYBOLD ITR100-T
    TEL ES1D80-002858-11 ENDPOINT CABLE
    TEL ES1D80-002917-11 BREAK FILTER
    TEL ES1D80-003560-11 REGULATOR
    TEL ES1D80-004121-25 MATCHER,,AMN-30C11
    TEL ES1D81-000049-13 PCB PRESSURE SWITCH I/F BOARD
    TEL ES1D81-000065-27 PCB AC POW FAIL DET BOARD B
    TEL ES1D81-000088-11 PCB ASSEMBLY TV B0008-1/VMIF
    TEL ES1D81-000092-16 PCB ASSEMBLY TYB121-1/COM
    TEL ES1D81-000097-A5 PCB ASSEMBLY TYB212-A/FR
    TEL ES1D81-000098-B2 PCB ASSEMBLY TYB 112-BDIO
    TEL ES1D81-000098-B4 BRD, ASSY, TYB112-B/DIO
    TEL ES1D81-000098-B8 PCB, TYB-111B/DIO
    TEL ES1D81-000099-A5 PCB ASSEMBLY TYB111-A/MAIO
    TEL ES1D81-000104-14 PCB TYB411-1/TC
    TEL ES1D81-000113-17 PCB ASSEMBLY TYB221-1/PUMP
    TEL ES1D81-000118-15 PCB TYB417-1/OPE
    TEL ES1D81-000130-19 PCB, TYB416-1/PUMP
    TEL ES1D81-000136-22 PCB TYB223-2/SW
    TEL ES1D81-000137-12 EXTENER CARD
    TEL ES1D81-000142-17 TYB41F-1 P/C
    TEL ES1D81-000292-14 PCB TYB412-1/CC
    TEL ES1D81-000293-11 PCB TYB31D-1/TC
    TEL ES1D81-000302-11 I/FBOARD
    TEL ES1D85-009005-13 88DRM GROOVE ESC
    TEL ES1D86-003374-15 CABLE TC , CONV (T/C)
    TEL ES1D86-003597-12 HEATER,ASSY
    TEL ES1D86-003599-12 HEAT WALL RELAY CABLE
    TEL ES1D86-003676-12 PC 1 SENSOR CABLE
    TEL ES1D86-003775-14 ESC HIGH VOLTAGE CABLE
    TEL ES1D86-003812-13 SENSOR, PC, PC2 WALL PT
    TEL ES1D86-003814-12 SENSOR ASSY PC/PC2
    TEL ES1D86-003950-12 CABLE,GHOST COMMUNICATION
    TEL ES1D86-004358-12 T/C
    TEL ES1D86-006761-21 RF CABLE
    TEL ES1D86-006888-11 SENSOR, PC PC1 COVER OPEN
    TEL ES1D86-006888-11 SENSOR, PC PC1 COVER OPEN
    TEL ES1D86-006889-11 SENSOR, PC, PC2 COVER OPEN
    TEL ES1D86-009061-13 TC/SENSOR PC 1 BOTTOM
    TEL ES1D86-009062-13 T/C SENSOR
    TEL ES1D86-017747-11 SENSOR, PRESSURE, 622A01TDE
    TEL ES1D86-050199-11 CABLE ASSY..HDD BASE(SIG)
    TEL ES1D86-092740-TM CA:31D/CN14 TO417/CN2
    TEL ES1D87-000832-12 MONOCHRO UNIT, EPD BOX
    TEL ES1N10-402337-11 PIN POSITIONING
    TEL ES1N80-000067-13 RF GENERATOR, OEM-10B-8
    TEL ES203-001757-1 SPACER=0.4MM
    TEL ES3D10-302567-12 EXTRACTOR FOCUS RING
    TEL ES802-420023-1 CONNECTOR ADD WORK
    TEL ES810-220644-1 GATE
    TEL ES810-220689-1 BAFFLE B (8K)
    TEL ES810-220690-2 BAFFLE C (8K)
    TEL ES810-321363-1 WIRE ASSEMBLY
    TEL ES810-420062-1 SUPPORT, SHAFT, CLAMP
    TEL ES810-420072-1 LANTERN RING (6 DIA)
    TEL ES810-420170-1 COLLAR (12-6.2)
    TEL ES810-420197-2 RING BACKUP GATE
    TEL ES810-420212-1 LANTERN RING
    TEL ES810-420595-1 RF CONNECTOR
    TEL ES810-420901-1 SCREW BRACKET
    TEL ES810-420924-1 SHIELD BUSHING
    TEL ES810-420950-1 LIMIT FLAG
    TEL ES810-420951-1 CONNECT BLOCK
    TEL ES810-422081-1 BACK UP RING
    TEL ES810-423392-2 SCREW
    TEL ES810-423457-2 SPROCKET 5KB
    TEL ES810-423575-2 BAFFLE SCREW (L=12)
    TEL ES810-423576-2 BAFFLE SCREW (L=5)
    TEL ES810-423904-2 GAS INLET
    TEL ES810-424023-1 LINKAGE DRP
    TEL ES810-424095-1 GAP MOUNT..MOTOR,(5KB)#
    TEL ES810-424122-1 HOLD PIN
    TEL ES810-424133-2 WINDOW(2)
    TEL ES880-020077-1 DIFFERENTIAL PRESSURE SWITCH
    TEL ES880-020115-3 EJECTOR ZX1052-J26LZ-EC-X116
    TEL ES880-020116-2 VV5J3-D32P1-04-C4-X68
    TEL ES880-020125-6 CYLINDER C-2-FA-60-R3
    TEL ES880-020334-1 GALDEN LINE TV CHAMBER
    TEL ES881-521480-7 PCB TSBC-COMIF-B(ATM/MAIN 01 SUB 08)
    TEL ES881-521490-7 PCB TSBC-V30SLV SUB 3(ATM/MAIN 04)
    TEL ES881-521491-1 PCB TSBC-V30SLV SUB 2(ATM/MAIN 03)
    TEL ES881-620571-3 PCB EDGE DETECTOR BOARD (ATM)
    TEL ES881-620641-2 PCB EPD BOARD (KTN)
    TEL ES881-620890-2 PCB H/A ROT/EXT INTCON BOARD (ATM)
    TEL ES881-621144-2 PCB AC POW FAIL DET BOARD 2 (CONT)
    TEL ES881-621472-1 PCB SLAVE IF(STD)WITH REG.(ATM)
    TEL ES881-621473-4 PCB SLAVE IF(STD)NO REG. (ATM/OPER IF)
    TEL ES881-621500-2 PCB SBX-S104(ATM/MAIN 07)
    TEL ES881-621601-2 PCB CHILLER IF BOARD (I/L)
    TEL ESD1D81-000130-18 PCB TYB 416-1/PUMP
    TEL ESM10-100639-1 UPPER ELECTRODE C,COOLING
    TEL F10-75815-15 CRYO MAIN VALVE
    TEL F370-1586-03 KEYBOARD
    TEL F689ZZ FLANGED ROLLER BEARING
    TEL F697ZZ BEARING
    TEL F900-F-6-35 CONNECTOR (GAS TUBE)
    TEL F900-H-9.52C 9.52 FITTING TUBE F900-H-9.52C
    TEL F95-44620 FLOWMETER
    TEL F95-46090 FLOWMETER
    TEL FC-PC28-TUR FLOWMETER & FLOWSWITCH EXT BUR
    TEL FC-PC28-TUR FLOWMETER & FLOWSWITCH EXT BUR
    TEL FC-SE-01 FLOW CHECKER
    TEL FE52-3TPS 030130 HOT-GP-230-TEL-1
    TEL FPR-6.35 GT HEAD
    TEL FU081061 PAD SILICONE, TRANSPORTER PAN
    TEL GF99-41088 FLOWMETER
    TEL GFG01KP3 WAFERGARD GASLINE 1/8"FILTER
    TEL GP-1SRY-S CONTROLLER, PIRANI GUAGE
    TEL H1-X 706-0001 82334.5 CW MOTOR CHOP ASSEMBLY
    TEL H7881-AA POWER SUPPLY FOR DECSERVER700
    TEL HPS-102 PIPING
    TEL HPS-102 PIPING
    TEL HPS-109 PIPING P-D-POLY
    TEL HPS-111 PIPING
    TEL HPS-113 PIPING
    TEL HSR15CA-230LM LINEAR GUIDE FOR ROBOT
    TEL HZCAA1025AC001 PROFILER PAPER LP'S
    TEL ICC-G-MB-250L ION EXCHANGER FOR DI WATER
    TEL ID80-002748-11 VALVE, VAC, V376
    TEL IFR048205 INITIAL STATION SENSOR 302-077.005-
    TEL IM15-ZQ STAGE ZQ
    TEL IV10-361807-13 FARADAY, PIN INSULATOR
    TEL IVBH25CA-NWKL-29-SC VALVE, MAIN HEATER
    TEL K1010 CHUCK MOTOR CABLE
    TEL KITZEA200-UTE PURGE VALVE OUT
    TEL KR1075 RBLD KIT, TREBOR 75 SURG
    TEL KTI-221018-14 RING, SHIELD T5 P/C
    TEL L25-YA54 CABLE, T.C.
    TEL L420449 BEARING
    TEL L456105-05 O-RING P8FPM(S5000)
    TEL L456759 S500 SAMPLE ROD O-RING  ,L456759.
    TEL LF-1260ZZ BEARING
    TEL LH00808-CPU BOARD, CIRCUIT
    TEL LMH7FJW LAMP
    TEL LMK25 LINEAR BUSH
    TEL LMK25M LINEAR B
    TEL LMK25MAUU SLIDE BUSH
    TEL LPV1-25-AK-CNVS VALVE FOR ON BOARD CRYO 8F
    TEL M-121CTL FURNACE TEMP CONTROLLER
    TEL M02-400071-1 WAFER ROTARY GEAR A
    TEL M02-400072-2 WAFER ROTARY GEAR (B)
    TEL M02-400128-1 CENTER RING MESH #8 50
    TEL M054000031 SPRING
    TEL M0840-39950-SS520 O-RING CHAMBER LID
    TEL M10-100029-6 6" LOWER ELECTRODE
    TEL M10-10030-6 UNDER ELECTRODE
    TEL M10-200037-2 CHAMBER BOTTOM SPACER
    TEL M10-200039-4 TOP PLATE
    TEL M10-200054-2 LOWER ELECTRODE COOLING RING
    TEL M10-200061-4 PLATE PERF
    TEL M10-200135-3 UPPER ELECTRODE
    TEL M10-200302-4 INSULATOR (A)
    TEL M10-200768-1 PLATE TOP, TYPE 3
    TEL M10-300040-1 PLATE
    TEL M10-300074-4 INDUCTOR COIL
    TEL M10-300106 FOCUS RING
    TEL M10-300106-8 LOWER ELECTRODE COVER
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