纭呰杽鑶滀綔鐐鸿杽鑶滃お闄借兘闆绘睜鐨勬牳蹇冩潗鏂欒秺渚嗚秺寮曡捣浜哄€戠殑閲嶈, 闈炴櫠纭呰杽鑶滃お闄借兘闆绘睜鐢变簬瀛樺湪杞�(zhu菐n)鎻涙晥鐜囦綆鍜岀敱 S-W 鏁堟噳(y墨ng)寮曡捣鐨勬晥鐜囪“閫€绛夊晱椤�, 鑰屽井鏅剁钖勮啘鍏锋湁杓冮珮闆诲皫(d菐o)鐜�銆佽純楂樿級娴佸瓙閬风Щ鐨勯浕瀛�(xu茅)鎬ц唱(zh矛)鍙婂劒(y艒u)鑹殑鍏夊(xu茅)绌�(w臎n)瀹氭€�, 鍙互鍏嬫湇闈炴櫠纭呰杽鑶滅殑涓嶈冻, 宸叉垚鐐哄厜浼忛牁(l菒ng)鍩熺殑鐮旂┒鐔遍粸(di菐n).
閲囩敤纾佹帶婵哄皠娌夌⿳纭呰杽鑶滀笉闇€瑕佷娇鐢� SiH4 绛夋湁姣掓埃楂斿強鐩告噳(y墨ng)鐨勫熬姘ｈ檿鐞嗚缃�, 鏈夊埄浜庨檷浣庤ō(sh猫)鍌欐垚鏈�, 涓斿伐钘濆弮鏁�(sh霉)瀹规槗鎺у埗, 鍥犳缍�(j墨ng)閬庝集鏉卞伐绋嬪斧鎺ㄨ枽, 闀锋矙鏌愬ぇ瀛�(xu茅)瀵�(sh铆)椹�(y脿n)瀹よ椤岀鍦ㄧ爺绌跺井鏅剁钖勮啘鏅�(sh铆), 閲囩敤浼澅 KRI 鑰冨か鏇煎皠闋婚洟瀛愭簮 RFICP380 杓斿姪纾佹帶婵烘矇绌嶅埗鍌欏井鏅剁钖勮啘.
KRI 灏勯牷闆㈠瓙婧� RFICP380 鎶€琛�(sh霉)鍙冩暩(sh霉):
|
灏勯牷闆㈠瓙婧�鍨嬭櫉(h脿o) |
RFICP380 |
|
Discharge 闄芥サ |
灏勯牷 RFICP |
|
闆㈠瓙鏉熸祦 |
>1500 mA |
|
闆㈠瓙鍕�(d貌ng)鑳� |
100-1200 V |
|
鏌垫サ鐩村緫 |
30 cm 桅 |
|
闆㈠瓙鏉� |
鑱氱劍, 骞宠, 鏁ｅ皠 |
|
娴侀噺 |
15-50 sccm |
|
閫氭埃 |
Ar, Kr, Xe, O2, N2, H2, 鍏朵粬 |
|
鍏稿瀷澹撳姏 |
< 0.5m Torr |
|
闀峰害 |
39 cm |
|
鐩村緫 |
59 cm |
|
涓拰鍣� |
LFN 2000 |
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瑭﹂(y脿n)绲�(ji茅)鏋�:
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KRI 闆㈠瓙婧�鐨勭崹(d煤)鐗瑰姛鑳藉(sh铆)鐝�(xi脿n)浜嗘洿濂界殑鎬ц兘, 澧炲挤(qi谩ng)鐨勫彲闈犳€у拰鏂扮⿴鐨勬潗鏂欏伐钘�. KRI 闆㈠瓙婧�宸茬稉(j墨ng)鐛插緱浜嗙悊鎯崇殑钖勮啘鍜岃〃闈㈢壒鎬�, 鑰岄€欎簺鐗规€у湪涓嶄娇鐢� KRI 闆㈠瓙婧�鎶€琛�(sh霉)鐨勬儏娉佷笅鏄劇娉曞(sh铆)鐝�(xi脿n)鐨�.
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