緊湊型結(jié)構(gòu)以滿足更小的物理空間安裝需求。
高氣流量和高抽速。
可任意角度安裝。
防護(hù)等級(jí)IP54符合工業(yè)環(huán)境應(yīng)用要求。
可應(yīng)用于腐蝕性氣體工況。
SEMI S2 和 UL認(rèn)證。
完整的配件系統(tǒng)擴(kuò)展了潛在客戶的需求。
更長(zhǎng)時(shí)間維護(hù)保養(yǎng)時(shí)間。
可現(xiàn)場(chǎng)更換軸承。
|
Bearing 軸承 |
Hybrid |
|
Compression ratio for Ar 氬氣壓縮比 |
> 1 · 1011 |
|
Compression ratio for H2 氫氣壓縮比 |
1.4 · 105 |
|
Compression ratio for He 氦氣壓縮比 |
1.3 · 107 |
|
Compression ratio for N2 氮其壓縮比 |
> 1 · 1011 |
|
Cooling b, optional 冷卻方式，選擇性 |
Air/water |
|
Cooling b, standard 冷卻方式，標(biāo)準(zhǔn) |
Convection |
|
Cooling water consumption 冷卻水耗量 |
75 l/h |
|
Cooling water temperature 冷卻水溫度 |
5-25 °C | 41-77 °F | 278-298 K |
|
Electronic drive unit 控制器 |
with TC 110 |
|
Flange (in) 法蘭（進(jìn)） |
DN 63 ISO-K |
|
Flange (out) 法蘭（出） |
DN 16 ISO-KF / G 1/4" |
|
Fore-vacuum max. for N2 氮?dú)庾畲笄凹?jí)真空 |
22 hPa | 16.5 Torr | 22 mbar |
|
Gas throughput at full rotational speed for Ar 氬氣全轉(zhuǎn)速時(shí)的氣流量 |
0.54 hPa l/s | 0.4 Torr l/s | 0.54 mbar l/s |
|
Gas throughput at full rotational speed for H2 氫氣全轉(zhuǎn)速時(shí)的氣流量 |
15.3 hPa l/s | 11.48 Torr l/s | 15.3 mbar l/s |
|
Gas throughput at full rotational speed for He 氦氣全轉(zhuǎn)速時(shí)的氣流量 |
2.7 hPa l/s | 2.02 Torr l/s | 2.7 mbar l/s |
|
Gas throughput at full rotational speed for N2 氮?dú)馊D(zhuǎn)速時(shí)的氣流量 |
1.3 hPa l/s | 0.98 Torr l/s | 1.3 mbar l/s |
|
Interfaces 接口 |
RS-485, Remote |
|
Mounting orientation 安裝方向 |
in any orientation |
|
Operating voltage 運(yùn)行電壓 |
24 (± 5 %) V DC |
|
Permissible magnetic field max. 容許的最大磁場(chǎng) |
3.3 mT |
|
Protection category 防腐等級(jí) |
IP 54 |
|
Pumping speed for Ar 氬氣抽速 |
66 l/s |
|
Pumping speed for H2 氫氣抽速 |
48 l/s |
|
Pumping speed for He 氦氣抽速 |
58 l/s |
|
Pumping speed for N2 氮?dú)獬樗?/span> |
67 l/s |
|
Rotation speed ± 2 % 旋轉(zhuǎn)速度 ± 2 % |
90000 min-1 |
|
Rotation speed variable 可變旋轉(zhuǎn)速度 |
50-100 % |
|
Run-up time 啟動(dòng)時(shí)間 |
1.7 min |
|
Sound pressure level 聲壓級(jí) |
≤ 48 dB (A) |
|
Ultimate pressure according to PNEUROP 根據(jù)PNEUROP的極限壓力 |
< 1 · 10-7 hPa | < 7.5 · 10-8 Torr | < 1 · 10-7 mbar |
|
Venting connection 排氣連接件 |
G 1/8" |
|
Weight 重量 |
2.4 kg | 5.29 lb |
Pfeiffer vacuum渦輪分子泵 Hipace80尺寸
Pfeiffer vacuum渦輪分子泵Hipace80抽速
