耗前后數(shù)據(jù)對(duì)比,檢查節(jié)能降耗實(shí)施作用。
MKS 146B 4 Channel MFC Gas Mass Flow Controller 146 B
Comet Mini Vacuum Capacitor 15kV 210pF MC1C-210 E/15
Advanced Energy AE RFG 2000-2V RF Generator 3155053-007
Leybold Ionivac High Vacuum Ion Gauge Controller IM110D
Leybold Turbovac TMP 50 High Vacuum Turbo Pump ISO 100
MKS 2 Torr Baratron Pressure Transducer 122BA-00010EB
MDC High Vacuum Gate Valve NW KF QF 50 KGV-2000V-P-03
Nor-Cal High Vacuum Isolation Valve conflat 221-921-900
Lot of 6 Fujikin Gas Flow Control Valves 2 manifolds
Advanced Energy PDX900-2V RF Generator AMAT 3156024-110
Spellman High Voltage Power Supply Pre Load RSB40X3995
Kaiser KSI High Voltage Power Supply +1 kV 1A S1-1-1000
Varian High Voltage Surge Suppressor E11029161 Edal HVR
AE Advanced Energy RFG 1251 RF Generator 3155107-001 B
AE Advanced Energy RFX 2500 RF Generator 3155011-000
Advanced Energy Apex 3013 RF Plasma Generator 3kW AE
RFPP RF5S RF Generator RF 5S Plasma Advanced Energy AE