R900979378此次開發(fā)主要解決了在半導(dǎo)體晶圓上形成熱電薄膜、觸媒膜、電極、配線及加熱器的傳感器元件制造技術(shù)。同時(shí)，還提高了傳感器的耐用性，降低了生產(chǎn)成本。作為熱電轉(zhuǎn)換元件的關(guān)鍵技術(shù)，確立了利用濺射蒸鍍法形成SiGe膜之后進(jìn)行熱處理的薄膜成形技術(shù)。因?yàn)镾iGe熱電轉(zhuǎn)換材料的熱電特性高，非常適宜采用半導(dǎo)體工藝。為了使觸媒不受大氣中水蒸汽的影響而穩(wěn)定地發(fā)揮作用，溫度要維持在100℃。作為維持觸媒溫度的加熱器集成技術(shù)，采用MEMS技術(shù)研制出隔熱性很高的微加熱器。將熱電圖、微加熱器、觸媒3個(gè)組成要素集成到了尺寸約為1×2mm2的薄膜上，制成了尺寸為4×4mm2的傳感器芯片。
R900979378在以陶瓷為支撐材料的鉑觸媒耐用性試驗(yàn)中，將新開發(fā)的微型熱電式氫氣傳感器放置在相對(duì)溫度約為65%的室溫環(huán)境中，持續(xù)工作了3個(gè)月，在此期間對(duì)它對(duì)100ppm，1000ppm和1%氫氣濃度的反應(yīng)特性進(jìn)行了測(cè)試。結(jié)果證實(shí)，性能十分穩(wěn)定。此次采用普通半導(dǎo)體工藝，就將微型傳感器集成到了硅底板上，因此該公司認(rèn)為，將來還可集成處理傳感器信號(hào)的電子線路，因此便于小型化，以及通過量產(chǎn)降低生產(chǎn)成本，實(shí)用潛力很大。
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