A 帶有機架號的鍵開關(guān)
B、C 冗余電源模件
D、E、F 三個主處理器
G 網(wǎng)絡通訊模件（NCM），在COM槽內(nèi)
H、I 空白
J、K 數(shù)字輸入模件，帶熱插備伯
L、M 空白
N、O 數(shù)字輸出模件，帶熱備
P、Q 留空
R 加強型智能通訊模件（EICM）
S 空白
圖2-1 主機架,前視
2.1 主機架與擴展機架
Tricon機架可以用架裝形式或盤裝而裝在工業(yè)標準的NEMA機殼內(nèi)。主機架或擴展機架的具體尺寸為48.3cm×57.8cm×45.1cm（19英寸×22.75英寸×17.75英寸）（寬×高×深）。
圖2-1和2-2示出標準的主機架和擴展機架。主機架可以支持下列模件：
—兩個電源模件
—三個主處理器
—通訊模件，例如ICM、NCM、ACM或者SMM
—I/O模件，帶熱備
—通訊模件（僅限于#2擴展機架）
每個機架具有不同的總線地址（1到15）；機架內(nèi)的每個模件具有地址，由位置或槽位決定它的具體地址（見附錄B）。主機架上有一個四位置的鍵開關(guān)，用以控制整個的Tricon系統(tǒng)。開關(guān)的設定為RUN（運行）、PROGRAM（編程）、STOP（停止）和REMOTE（遠程）。進一步的資料參閱第4章，“安裝與檢驗”。
KLA-Tencor SLX Reflected A-B 2711-K9A1 Light Assy 760-333022-000 Used
KLA-Tencor SLX Reflected Light Assy 760-333022-000 Used
KLA-Tencor AIT/UV Laser Servo Detector 0099572-000 New
KLA-Tencor Upper Housing Assy. 781-21332-000 working
KLA-Tencor CRS1010 BF/DF Control PCB 000675T
KLA-Tencor 5300 AMS Assy 720-480036-002 Used, Untested
KLA-Tencor SLX Preamp Assy. 775-334268-000 untested
KLA-Tencor CRS1010 Filter Wheel Drv. PCB 000674T
KLA Tencor P/N: 710-060031
Expedited shipping available A-B 2711-K9A1
NEAT 330UP Program Motion Controller KLA-Tencor CRS1010
KLA-Tencor V3 Objective Mount 760-062480-00 working
LOT KLA TENCOR POWER CHANGER ND FILTER MOTORS ACTUATORS
KLA-Tencor AIT UV Laser Servo Detector 0099586-001 Used
KLA-Tencor CRS1010 Solenoid PCB 000678 working
KLA-Tencor CRS1010 Driver Module 000675T working
KLA-Tencor CRS1010 Laser Power Board 0046591-000
KLA-Tencor Objective Mount Assy. 760-321062-001 working
KLA-Tencor CRS-1010 Control PCB 311-14988-1 working
KLA-Tencor SLX Relay/M5 Assembly 760-333019-001 Used
KLA-Tencor SLX Objective A-B 2711-K9A1 Mount 760-333005-000 Untested
KLA-Tencor CRS1010 Turret Optics PCB 000676 working
KLA-Tencor CRS1010 BF/DF Control PCB 000675 working
KLA-Tencor CRS1010 Mirror Assembly working
KLA-Tencor CRS1010 Solenoid PCB Assy. 000678 working
KLA-Tencor SLX RF Bench Assy. 740-336864-001 working
KLA-Tencor CRS1010 Page Scanner PCB 000134
KLA-Tencor CRS1010 TRT/OPT PCB 001009T working
KLA Tencor Instruments PN: 080810 PCB ASSY, SFS-4500
KLA-Tencor SLX Objective Lens 760-334096-000 Untested
KLA-Tencor CRS1010 A-Stop Control PCB 001002 working
KLA-Tencor SLX Telescope A-B 2711-K9A1 Turret 740-333024-001 untested
KLA-Tencor SLX MAC Box Assy. 770-336660-001 untested
KLA-Tencor CRS1010 Lens Filter Assy. 002001 working
KLA-Tencor CRS1010 Camera Lens Filter 002001
KLA-Tencor PWA E11-13209-7 REV-D E11-13209
KLA-Tencor CRS1010 Solenoid PCB 000678T working
KLA Tencor PN: 770-809195-000 Image Processor Board
KLA-Tencor CRS1010 Camera Filter Assy. 000056 working
KLA-Tencor CRS1010 Lens Filter Assy. 000056 working
COMDEL CPS SERIES RF A-B 2711-K9A1 GENERATOR KLA TENCOR POWER SUPPLY
KLA-Tencor CRS1010 A-Stop Control PCB 001002 working
KLA-Tencor CRS1010 Filter Wheel Drv. PCB 000674 working
KLA-Tencor CRS1010 Fast Z Controller PCB 001003
KLA Tencor 730-656752-000 Cable Assy
KLA-Tencor CRS1010 Page Scanner PCB 000134 working
KLA-Tencor CRS1010 A-Stop Control PCB 001002T working
KLA-Tencor GSI Lumonics X-Y Scanner PCB CCA-10069 Pair
