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MKS ASTeX ASTRONi Remote Plasma Source AX7670

Rev.D

MKS Astex AX2110 1000w Microwave Power Generator

MKS ASTeX ASTRONhf Remote Plasma Source AX7640-01

Rev.A Rebuilt 0190-73469

MKS ASTEX ASTRON FI20620-1 REMOTE PLASMA SOURCE

GENERATOR #2

MKS ASTeX ASTRON2L Remote Plasma Source FI20620-1

-C Rev.G rebuilt 0920-00013

MKS ASTeX ASTRON2L Remote Plasma Generator

FI20620-1 Rev.D working

NEW ASTeX 5kW 2.0 MHz Variable Source RF Generator

MKS

MKS Astex AX7650 ATOMIC FLOURINE GENERATOR, OEM

BOX, AMAT 0920-01120

MKS ASTeX ASTRON2L Remote Plasma Source FI20620-1

Rev.G 0920-00013 used 656hours

MKS ASTeX ASTRONe Remote Plasma Source Working

MKS ASTeX ASTRONex Remote Plasma Source FI80131

working

MKS ASTeX ASTRONex AX7685-20 Rev. A Remote Plasma

Source 0190-34542 working

MKS ASTeX ASTRONex Remote Plasma Source FI80131

Rev.C working 0920-00131

MKS ASTeX ASTRON2L Remote Plasma Generator

FI20620-1 Rev.D working 0920-00013

MKS Astex Reactive Astron Gas Generator Reworked

MKS ASTex AX8200F Ozone generator AX8200A-CE used

Refurbished ASTeX MKS AG1111 4.8kV power supply

w/certificate

NEW MKS/Astex WG21100 Water-Cooled Dummy Load

MKS ASTeX ASTRONex FI80131 Remote Plasma Source

Generator 0920-00131 Rev.D as-is

MKS ASTeX ASTRONi AX7670-06 Remote Plasma Source

Rev.A 0920-00100 as-is

MKS ASTeX ASTRONex Remote Plasma Source AX7685-20

Rev.A as-is 0190-34542

Astex 1000w magnetron head with isolator and three

stub tuner - mks daihen

MKS ASTex AX8200F Ozone generator used

MKS ASTeX S-1500i: 1500 Watt Microwave Power

Generator

MKS ASTeX Smart Power 1.8 kW HV Microwave Power

Supply: FI20161-1 or FI20160-2

MKS ASTeX ARX Microwave Control Module AMAT 0190-

00398

MKS AX8500 Delivery System Astex Control Interface

MKS ASTeX Ozone Generator AX8400 Rev. T as-is

MKS Astex AGL Microwave w/Plasma D12691-R 0190-

09307

MKS ASTeX SF controller ABX-X450 rev F

ASTeX ETO SSD Driver Board ARX-X267 ABX-X348 Solid

State RF MKS / AMAT /Warranty

ASTEX MKS CONTROL UNIT PCB A5, X226, LIQ 34-0018-

SP-02