|
Size |
1/2″, 3/4″ |
|
Cv Value |
3.5 |
|
Max. Working Pressure (G.) |
1.5MPa |
|
Operating Pressure (G.) |
0.5~0.7MPa |
|
Max. Working Temp. |
-10℃ ~ 65℃ |
|
Internal Leakage Allowance (He) |
1x10-10 Pa · ㎥/s |
|
Test Pressure ≤ 1×10-2 Torr | |
|
Holding Time ≥ 15 sec. | |
|
External Leakage Allowance (He) |
1x10-10 Pa · ㎥/s |
|
Test Pressure ≤ 1×10-2 Torr | |
|
Holding Time ≥ 1 min. | |
|
Particle Inspection (EP only) |
No count |
|
Pressure : 60~80psi N2 Gas | |
|
Sample Volume : 1CFM | |
|
0.1㎛ and Larger |