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Leybold 钀婂 鐪熺┖瑷�(j矛) TTR91RN-16KF 鍚鏄庢浉

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TTR91RN-16KF 鏄悐瀵舵柊涓€浠ｇ毊鎷夊凹锛圥irani锛夌湡绌鸿▓(j矛)锛屽爆浜� TTR-RN 绯诲垪 鐨勫崌绱氬瀷铏�锛岄噰鐢� MEMS 鍌虫劅鍣ㄦ妧琛�(sh霉) 鍜� 鐨媺灏肩啽灏�(d菐o)鍘熺悊锛岄仼鐢ㄤ簬宸ユキ(y猫)銆佺鐮旂瓑闋�(l菒ng)鍩熺殑绮楃湡绌鸿嚦涓湡绌烘脯閲忋€傚叾鏍稿績鍎�(y艒u)鍕㈠寘鎷細

• 閲忕▼鑼冨湇锛�0.0005 mbar锛�5脳10?? mbar锛夎嚦 1000 mbar銆�

• 鎺ュ彛椤炲瀷锛欿F16 娉曡槶锛屽吋瀹规(bi膩o)婧�(zh菙n)鐪熺┖绯荤当(t菕ng)閫ｆ帴9銆�

• 鎶楁薄鏌撹ō(sh猫)瑷�(j矛)锛氶泦鎴愰亷婵惧櫒鍜岃€愮敤鐨勭噲绲诧紙閹㈡垨閴戦噾鏉愯唱(zh矛)锛�锛岄仼鎳�(y墨ng)鐏板〉鎴栭绮掕純澶氱殑宸ユキ(y猫)鐠�(hu谩n)澧�銆�

• 楂樼簿搴︼細鍦� 1脳10?3 mbar 鑷� 100 mbar 鑼冨湇鍏�(n猫i)锛岀簿搴﹀彲閬�(d谩)璁€鏁�(sh霉)鐨� 卤5%銆�

浜�銆佸畨瑁濊垏閫ｆ帴

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2. 闆绘埃閫ｆ帴

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涓夈€佹搷浣滄椹�

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鍥涖€佹牎婧�(zh菙n)鑸囩董璀�(h霉)

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2. 缍(h霉)

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   • 閬庢烤鍣ㄦ竻娼旓細瀹氭湡妾㈡煡闆嗘垚閬庢烤鍣�锛屾竻闄ょ伆濉典互淇濇寔娓噺绌�(w臎n)瀹氭€�銆�

浜�銆佸畨鍏ㄨ垏娉ㄦ剰浜嬮爡(xi脿ng)

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Leybold 钀婂 鐪熺┖瑷�(j矛) TTR91RN-16KF 鍚鏄庢浉