KLA-Tencor 710-659465-20 Rev. B0 PCB Working
KLA Instruments Memory Controller Board 710-658232-00 R
KLA Instruments Processor Board 710-658046-20 Rev. E0 U
KLA Instruments Alignment Processor Board 710-658041-20

KLA Instruments X Interpolator Board 710-658177-20 Rev.
KLA Instruments X Interpolator Board 710-658177-20 Rev.
KLA Instruments Alignment Processor Board 710-658036-20

KLA Instruments Defect Processor Board 710-658076-20 Re
KLA Instruments Y Interpolator Board 710-658172-20 Rev.
KLA Instruments Defect Filter Board 710-659724-00 Rev.
KLA Instruments RIF Assembly Board 710-652840-20 Rev.

KLA Instruments DF Board Assembly 710-658363-20 Rev. B0
KLA Instruments Interface Board 710-658086-20 Rev. E0 U