CTI-Cryogenics P300 On-Board Cryopump P/N 8116250G002 U
CTI-Cryogenics On-Board P300 Cryopump 8116250G001 untes
Hitachi M-308ATE Taitec Heat Exchanger CH-400AHS-M0
AMAT XR80 Implanter Chamber Vacuum Cont 9090-00479 ITL
Tokyo Electron Limited Upper Y(Hand) Electrode
Yaskawa Servopack AC Servo Drive 0500-00285 SGDS-50
Adb AMAT cPCI-3720 Single Board Computer 0190-28791
HP Hewlett Packard 6260B DC Power Supply 0750-6310-010W
Asyst Load Port 300FL, S2.1HAMA/E-84 9700-6149-01
Anelva Motor Control Unit A A12-05110 working
Anelva Sputter Motor Control Unit-B A12-03638 working
MECS Corp. Wafer Prealigner AL100 untested
MECS Corp. Prealigner AL100 untested
AE Advanced Energy E'Wave 3152603-005 DC Power Supply R
