| 瑭崇窗鍙冩暩(sh霉) | |||
|---|---|---|---|
| 鍝佺墝 | 鍚庡崐杌告补灏� | 鍨嬭櫉 | 2300 |
| 澹撳姏 | 1 | 鏉愯唱(zh矛) | Elcometer |
| 娉佃桓浣嶇疆 | 钁夎吉鍚稿叆鏂瑰紡 | ||
| 椹�(q奴)鍕曟柟寮� | 鎬ц兘 | ||
| 鐢ㄩ€� | 鍒嗗瓙娉� | 鍘熺悊 | 闀峰煄 |
| 杓搁€佷粙璩�(zh矛) | 閬╃敤鑼冨湇 | 1 | |
| 娴侀噺 | 1 | 鎻氱▼ | 1 |
| 钁夎吉绲愭 | 1 | 钁夎吉鏁�(sh霉)鐩� | 1 |
| 宸ヤ綔澹撳姏 | 1 | 閲嶉噺 | 1 |
| 闆诲 | 220 | 鐢�(ch菐n)鍦� | 寰峰湅 |
HORIBA STEC LF-F404M-A-EVD OMCTS 5g/min娑茶唱(zh矛)娴侀噺瑷� 鐪熺┖瑷圱CGAUGE-VCR瑕�(gu墨)鏍煎瀷铏燂細NO.8112105
娣卞湷甯傚ぉ閴夌湡绌烘妧琛撴湁闄愬叕鍙窰ORIBA STEC娴侀噺瑷圠F-410A-EVD TEOS 4g/min娑茶唱(zh矛)澹撳姏瑷�
sell Exchang Repair
Debion娉ㄥ叆姗� FILAMENT P.S闆绘簮MKS钖勮啘鐪熺┖澹撳姏瑷�750C11MGA4GF
Aviza/SPTS Omega ICP etcher configuration inbation:
1.Configured for 8'' wafer
2.automatic wafer handling
3.Cl2 based etching process
4.3 process modules
5.Inspected by SPTS OEM engineer
6.Missing 1x Mag7 robot
7.Missing 1x VCE B controller
8.Missing 1x 24V DC Power supply
鍔犵啽鍏冧欢鐨勭櫦(f膩)鐔辫秺鏈夋晥锛岄渶瑕佸皪瀹冨€戦€茶鐨勫姞鐔卞氨瓒婂皯銆侾lansee 鐮旂櫦(f膩)浜嗕竴绋兘澶犳渶澶у寲鐔辫几鍑虹殑娑傚堡宸ヨ棟銆�
閹㈠熀灞ゅ叿鏈夐珮瀛旈殭鐜囩殑
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