數(shù)字量輸入模塊\JAMSC-120DAI74300
數(shù)字量輸入模塊\JAMSC-120DAI74300
數(shù)字量輸入模塊\JAMSC-120DAI74300
模擬量信號連接應(yīng)注意的問題變頻器中的模擬量輸入信號，通常指0～10V/5V 的電壓信號或0/4～20 ｍＡ的電流信號；這些模擬量輸入信號可通過接線端子由外部給定，當(dāng)變頻器與P L C 連接時，這些模擬量輸入信號也可來自PLC 的模擬量輸出信號，如圖3 所示。在進行模擬量的連接時應(yīng)注意：
（1）阻抗匹配。根據(jù)變頻器的輸入阻抗選擇P L C 的輸出模塊，實現(xiàn)兩者的阻抗匹配。
（2）電壓范圍。當(dāng)變頻器和P L C 的電壓信號范圍不同時（如變頻器的輸入信號為0～10V，而PLC 的輸出電壓信號范圍為0～5V 時；或PLC 的一側(cè)的輸出信號電壓范圍為0～10V而變頻器的輸入電壓信號范圍為0～5V時），需采用串聯(lián)電阻的方式進行分壓，以保證兩者在正常電壓范圍內(nèi)
工作，避免電壓過限可能損壞器件。
（3）采用屏蔽電纜或絞合電纜。對于變頻器和P L C 而言，弱電控制信號（電壓0～5V/10V、電流0/4～20ｍＡ等）易受到外界強信號的干擾，對控制信號采取適當(dāng)?shù)钠帘未胧?。常用的方式就是采用屏蔽電纜進行屏蔽；對于長距離的控制回路宜采用絞合電纜，絞合電纜的絞合間距盡可能小。
（4）主、控電纜分開布線。實際連線時，注意主、控電纜分開布線，且相隔的距離。以保證主電路側(cè)的干擾及噪音影響不到控制電路。
TEL ES1805-320125-21 COVER RING INNER
TEL ES1805-320126-21 COVER RING OUTER
TEL ES1805-320127-21 BASE RING INTEGRATED(SCCM-OX)
TEL ES1805-420055-11 PLATE WINDOW EPD(LLD-SE)
TEL ES1810-120660-13 UEL BODY (UNITY85PE)
TEL ES1810-121002-15 SPACER CERAMIC
TEL ES1810-121085-17 DEPO SHIELD
TEL ES1810-121190-12 ESC LOWER ELECTRODE 8N (PB-UP)
TEL ES1810-121898-13 SHIELD DEPO LOWER-Y
TEL ES1810-121899-12 PLATE EXHAUST T6 EXH-Y
TEL ES1810-220986-14 INSULATING PIPE (8K-ESC)
TEL ES1810-221024-14 UPPER COOLING PLATE
TEL ES1810-221063-14 EXHAUST RING B(8K-ESC)
TEL ES1810-221470-24 UPPER ELECTRODE (8K-180)
TEL ES1810-222811-11 INSULATOR UPPER
TEL ES1810-223289-13 SLIT EXT PLATE W1. 6P3.1 (GROUND)
TEL ES1810-223352-11 COVER WALL CHAMBER BOTTOM (GND)
TEL ES1810-223352-11 COVER WALL CHAMBER BOTTOM (GND)
TEL ES1810-224511C11 FOCUS RING 8-NW-2(8K-ESC)
TEL ES1810-225123-11 FOCUS RING
TEL ES1810-322044-11 CENTERING W/MESH (4")
TEL ES1810-322129-12 EXN RING A (8K-ESC)
TEL ES1810-323416-11 RING LABYRINTH(IPB)
TEL ES1810-323442-11 O-RING SHIELD A (IPB)(P/CGAP)
TEL ES1810-323444-11 O-RING SHIELD B (IPB) (P/C GAP)
TEL ES1810-323445-11 O-RING SHIELD B (IPB) (P/C GAP)
TEL ES1810-323465-11 HOLDER CERAMIC IEM B
TEL ES1810-323466 -11 HOLDER CERAMIC IEM C
TEL ES1810-323467-13 RF ROD(IPB)
TEL ES1810-323759-13 LIFTER X (8KI-ESC)
TEL ES1810-323760-12 LIFTER GUIDE (8KI-ESC)
TEL ES1810-323783-11 RF CONNECTOR A2 (IPB)
TEL ES1810-323897-11 RING PROTECT
TEL ES1810-324233-12 HOLDER ISOLATION GND ROD
TEL ES1810-324276-12 PIN LIFTER
TEL ES1810-324964-1 BELLOWS COVER
TEL ES1810-325059-11 PIN LIFTER ALUMINIUM
TEL ES1810-326611-11 WINDOW PLATE
TEL ES1810-327364-11 PTFE HOLDER
TEL ES1810-328005-11 COVER,PROTECT,ESC
TEL ES1810-328123-11 BELLOWS LIFTER
TEL ES1810-329064-12 WINDOW, AL-3-Y -
TEL ES1810-329078-11 COVER, SCREW A-AL-Y
TEL ES1810-329079-11 COVER, SCREW B - AL
TEL ES1810-424823-12 FEED TERMINAL
TEL ES1810-424835-12 SPRING B(ESC-3)
TEL ES1810-424945-16 SUPPORT GUIDE (8K-ESC)
TEL ES1810-424947-12 LIFTER SUPPORT (8K-ESC)
TEL ES1810-424955-11 RF ROD
TEL ES1810-425089-11 LIFTER STOPPER A (8K-ESC)
TEL ES1810-426215-11 TEFLON CAP B
TEL ES1810-426886-11 SCREW LIFTER (8KI-ESC)
TEL ES1810-426982-12 TEFLON RING
TEL ES1810-427260-11 CAP
TEL ES1810-427469-11 SCREW BLANK
TEL ES1810-427566-12 RF CONNECTOR B2 (IPB)
TEL ES1810-427841-12 LEVER
TEL ES1810-427842-12 STOPPER
TEL ES1810-427859-12 RF BLOCK TYPE B
TEL ES1810-427905-11 BLIND RF BLOCK(INSULATOR)
TEL ES1810-428050-11 FITTING INLET GAS B
TEL ES1810-428121-11 CREW BLANK
TEL ES1810-428129-11 SHIELD WINDOW
TEL ES1810-428233-12 BAFFLE MTG SCREW M3 X 12 AH-V50
TEL ES1810-428245-12 BAFFLE MTG SCREW M3X5 AH-V50
TEL ES1810-428336-11 TERMINAL, HIGH VOLTAGE
TEL ES1810-428520-12 PIN BOTTOM ELECTRODE SIDE WALL (0.5DIA)
TEL ES1810-428715-12 CAP ALUMINIUM 2
TEL ES1810-428806-11 UV CUT FILM (VIEW PORT)
TEL ES1810-428943-11 SUPPORT LIFTER 4 (IPB)
TEL ES1810-429126-11 GAS LINE P/C-2-UP (IPU)
TEL ES1810-429138-11 H CONNECTION TUNE (UP)(IPB)
TEL ES1810-429291-11 PIPE GAS HE
TEL ES1810-429649-11 PUSHER LIFTER (PTFE) 3
TEL ES1810-429707-12 UPPER ARM WIRE 180316 NYLON
TEL ES1810-429708-11 WIRE FOR ROBOT ARM
TEL ES1810-429709-11 WIRE FOR ROBOT ARM
TEL ES1810-430038-11 PLATE HOT BUSSBAR(RF)
TEL ES1810-430333-12 PIN FOR NEW UPPER COOLING BODY
TEL ES1810-431227-11 CAP C/P(MNT) For 85 SCCM UEL.
TEL ES1810-431239-11 PIN,LOCATING F/R TYPE C..S85DI.
TEL ES1880-020093-16 POWER SPLITTER
TEL ES1880-020094-15 MATCHER, MFM-20SA2
TEL ES1880-020100-12 BALL SCREW GZ1504ES-ZAPR-0211*0166
TEL ES1880-020101-12 BALL SCREW GZ1504ES-ZAPR-0191*0116
TEL ES1880-027197-11 AIR CYLINDER CDJ2B16DA-E5161
TEL ES1880-027247-12 BALL SCREW W1502-215X-C5T6
TEL ES1880-027248-12 BALL SCREW W1502-216X-C5T6
TEL ES1880-027504-11 AIR CLYINDER UC2-40-40-B2
TEL ES1881-022002-19 PCB SYSTEM I/O 2 (ATM/MAIN SUB 06&07)
TEL ES1881-022004-1C PCB EPD MONITOR BOARD (MAINTE CTLER)
TEL ES1881-022005-52 PCB EXT UNIT INTCON BOARD (DTM)
TEL ES1881-022006-13 PCB VAC INTCON BOARD
TEL ES1881-022018-17 PCB U/C IF BOARD(MAINTE CTLER)
TEL ES1881-022019-14 PCB REPEATER BOARD
TEL ES1881-022047-56 PCB VAC CONTROL BOARD 2 IEM I/L (L/L1)
TEL ES1881-022047-57 PCB VAC CONTROL BOARD 2 IEM I/L (L/L1)
TEL ES1881-022047-72 PCB VACUUM CONTROL BOARD 2
TEL ES1881-022048-11 PCB CHAM INTCON BOARD 2 (E/S)
TEL ES1881-022060-26 PCB EPD MONITOR BOARD 2(ESC)
TEL ES1881-022071-21 PCB AC DIST BOARD (HAS)
TEL ES1881-022075-11 PCB AGV MODE SW INTCON BOARD(ATM)
TEL ES1881-022118-28 PCB TSBC-V30B(SUB1)K8 (ATM/MAIN SUB 01)
TEL ES1881-022126-12 PCB CHAM INTCON BOARD 3 (P/C)
TEL ES1881-022132-21 PCB ANALOG MONITOR BOARD UTN(TMP)
TEL ES1881-022135-41 PCB OPERATOR IF BOARD 2 IEM (ATM/OPER IF)
TEL ES1881-022136-11 PCB OPE-PANE RELAY BOARD 3(MAINTE CTLER)
TEL ES1881-022137-11 PCB OPE-PANE RELAY BOARD 3(I/L)
TEL ES1881-022141-12 PCB RF CONTROL BOARD 4 (RF RACK)
TEL ES1881-022142-11 PCB GAS IF BOARD(HE2)
TEL ES1885-021882-12 P/C SHIELD RING
TEL ES1886-455163-13 INDEXER ENCODER
TEL ES1886-455164-12 INDEXER WATER SENSOR(LASER)
TEL ES1886-455164-13 INDEXER WATER SENSOR (LASER)
TEL ES1886-455165-12 INDEXER WATER SENSOR(PHOTO DIODE)
TEL ES1886-455165-13 INDEXER WATER SENSOR (PHOTO DIODE)
TEL ES1886-455221-12 P/C WALL PT SENSOR
TEL ES1886-455291-11 CHUCK MOTOR ASSEMBLY
TEL ES1886-455292-11 MOTER (P/A TWEEZERS)
TEL ES1886-455294-1 MOTOR (P/A)
TEL ES1886-455441-11 RF CABLE
TEL ES1886-456363-12 ROTARY MOTOR AND ENCODER
TEL ES1886-456364-12 EXTENDER MOTOR AND ENCODER
TEL ES1886-457617-17 RF CABLE 10M (ES1D86-008352-12)
TEL ES1886-458247-11 HAM LIFTER CYLINDER (ESC) ASSY
TEL ES1886-461134-13 RF GENERATOR-MFG-20A1
TEL ES1887-421988-11 GATE VALVE ASSEMBLY (IEM POLY)
TEL ES1A80-1016700-11 SERVICE BOX, Z-610PC-BNNN
TEL ES1D0-311007-12 TENSIONER GAP A1
TEL ES1D02-400026-11 SPROCKET DRIVE
TEL ES1D02-400026-11 SPROCKET DRIVE
TEL ES1D02-400215-11 SHIELD SPIRAL U-CHAM (S-DT)
TEL ES1D02-400262-11 SCREW BEARING
TEL ES1D05-200020-11 SHIELD DEPO
TEL ES1D05-200020C11 SHIELD, DEPO QU-A-3 (DRM2)
TEL ES1D05-200031-11 COVER..BAFFLE Q-L3(DRM2)
TEL ES1D05-300038-14 SHIELD DEPO DRM2
TEL ES1D05-300053-14 RING INSULATER B2 (DRM2)
TEL ES1D05-300083C13 PLATE UPPER QB FLAT
TEL ES1D05-300152-11 COVER..BAFFLE,Q-L,(DRM2)
TEL ES1D05-300152C11 COVER,BAFFLE,CESC
TEL ES1D05-300161-11 SHIELD, SUPPORT DEPO Q-S1
TEL ES1D05-300161C11 SHIELD,SUPPORT,DEPO,CESC
TEL ES1D05-300162C11 RING, FOCUS
TEL ES1D05-400022-14 WINDOW SHIELD DEPO DRM2
TEL ES1D05-400022C14 WINDOW SHIELD DEPO(DRM2)
TEL ES1D05-400028-11 WINDOW, UP A-2 (DRM)
TEL ES1D10-090515-TM COVER BELLOW A CE-Y FOR CE RAMIC
TEL ES1D10-100386-11 INSULATOR, BOTTOM P
TEL ES1D10-100670-13 ELECTRODE UPPER QB FLAT
TEL ES1D10-100907-12 BAFFLE PLATE
TEL ES1D10-100915-11 ELECTRODE UPPER QB. FLAT
TEL ES1D10-100938-12 RF PLATE,PC1 (DRM2)
TEL ES1D10-101111-11 RF PLATE,PC2 (DRM2)
TEL ES1D10-101446-22 PLATE,BAFFLE 0-12(DRM2)
TEL ES1D10-1014746-22 PLATE BAFFLE 0-12 (D RM2 )
TEL ES1D10-190272-TM COOLANT PIPE
TEL ES1D10-190477-TM BASE,DEPO SHIELD SUPPORT, E
TEL ES1D10-200705-14 UPPER, ELECTRODE, 1, (DRM2)
TEL ES1D10-200733-11 RING, SHIELD (DRM2)
TEL ES1D10-200921-12 DEPO SHIELD
TEL ES1D10-201429-15 UPPER,ELECTRODE R-1
TEL ES1D10-201588-12 UPPER ELECTRODE P (DRM2)
TEL ES1D10-201595-15 SHIELD, DEPOT 85L DRM2
TEL ES1D10-202177-12 UPPER ELECTRODE
TEL ES1D10-203753-12 RING, CENTERING-Y
TEL ES1D10-204310C11 200MM UPPER ELECTRODE MODIFIED
TEL ES1D10-301452-12 HOLDER,BEARING,(DRM2)
TEL ES1D10-302057-11 JIG, GAP (DRM2)
TEL ES1D10-302569-13 BRACKET..SLIDE,R,(DRM2)
TEL ES1D10-302586-12 COVER BELLOWS B
TEL ES1D10-302600-11 SUPPORT S-PIPE
TEL ES1D10-302869-11 PUSHER PIN
TEL ES1D10-302936-11 SHAFT RF INLET
TEL ES1D10-303014-12 SUPPORT SHIELD DEPO DRM2
TEL ES1D10-303124-16 DEPO SHIELD
TEL ES1D10-303124-M1 SHIELD, DEP
TEL ES1D10-303356-11 CASSETTE CHAMBER VACUUM PIPE
TEL ES1D10-303367-14 PIPE, TEE
TEL ES1D10-304039-11 FLEXLINE, HE/VAC
TEL ES1D10-305152-11 COVER , SCREW TEFLON
TEL ES1D10-305523-12 PIPE HE-IEM-UP
TEL ES1D10-305996-11 IPE..HE1-8
TEL ES1D10-306221-13 JIG RING, 2 (DRM2)
TEL ES1D10-306628-11 WINDOW DEPO DRM2
TEL ES1D10-308722-11 RING, FOCUS, SEASONED
TEL ES1D10-311007-12 TENSIONER GAP A1
TEL ES1D10-311008-11 TENSIONER GAP B1
TEL ES1D10-311117-12 PIPE PN2-CC-3
TEL ES1D10-311258-11 COVER,BEL-L(C-ESC)
TEL ES1D10-311259-11 COVER,BEL-S,(C-ESC)
TEL ES1D10-311259-11 COVER,BEL-S,(C-ESC)
