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Advanced Energy RF30S P/N# 3150017-012D
Lam Research 9600 Fast Acting Iso Valve S853-032983-001
Applied Materials 300mm DPS chamber p/n# 0040-07647
Applied Materials 300mm DPS Throttle Valve # 0010-39646
Applied Materials Neslab HX-150 p/n# 0010-00570 rev D
Lam 4520 Lam Research Rainbow 4520 200mm Oxide Etch
Lam Research AutoEtch 490
Advanced Energy PDW 2200 RF Generator 3156011-000B
ENI OEM-6 RF Generator
Lam Research Radius Electrode 715-008721-002
S716-011564-003 SFG Lam Graphite Electrode
Lam Research Electrode Black Anodized 715-008721-001
Lam Research Cathode Diffuser 716-006446-001
ENI OEM-650A XL RF Generator
Tokyo Electron TEL INR-244-602A Thermo-Con; Thermocon
Advanced Energy RFG 1250 RF Generator # 3155027-000
Advanced Energy RFG 3000 RF Generator # 5038-000-D
ESC 9600 S718-094756-081 (Replaces Lam 718-094756-081)
New In Box Lam 9600 200mm Electrostatic Chuck
Lam 9600 Lam Research TCP 9600SE 200mm Metal Etch
Lam 4520 Lam Research Rainbow 4520 200mm Oxide Etch
Lam 9600 Lam Research TCP 9600SE 200mm Metal Etch